Effects of inter-electrode gap and discharge voltage on EUV emission from stainless steel vacuum spark plasma

The emission of Extreme Ultra Violet (EUV) from plasma produced by vacuum spark discharge using stainless steel as anode material was investigated. The operating pressure for all the experiments carried out was maintained at below 10-4 mbar. The discharge voltage tested was from 8 kV to 20 kV. The i...

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Main Authors:	Saboohi, S, Yap, S·L, Chan, L·S, Wong, C·S
Format:	Article
Language:	English
Published:	Universiti Kebangsaan Malaysia 2012
Online Access:	http://journalarticle.ukm.my/5301/ http://journalarticle.ukm.my/5301/ http://journalarticle.ukm.my/5301/1/10%2520S%2520Saboohi.pdf

id	ukm-5301
recordtype	eprints
spelling	ukm-53012016-12-14T06:38:02Z http://journalarticle.ukm.my/5301/ Effects of inter-electrode gap and discharge voltage on EUV emission from stainless steel vacuum spark plasma Saboohi, S Yap, S·L Chan, L·S Wong, C·S The emission of Extreme Ultra Violet (EUV) from plasma produced by vacuum spark discharge using stainless steel as anode material was investigated. The operating pressure for all the experiments carried out was maintained at below 10-4 mbar. The discharge voltage tested was from 8 kV to 20 kV. The inter-electrode distance suitable for high intensity and reproducible EUV emissions was found to be in the range of 2.6 mm to 4.6 mm. The output EUV energy scaled as ~ V02, where V0 is the discharge voltage. Universiti Kebangsaan Malaysia 2012-07 Article PeerReviewed application/pdf en http://journalarticle.ukm.my/5301/1/10%2520S%2520Saboohi.pdf Saboohi, S and Yap, S·L and Chan, L·S and Wong, C·S (2012) Effects of inter-electrode gap and discharge voltage on EUV emission from stainless steel vacuum spark plasma. Sains Malaysiana, 41 (7). pp. 879-884. ISSN 0126-6039 http://www.ukm.my/jsm/contents.html
repository_type	Digital Repository
institution_category	Local University
institution	Universiti Kebangasaan Malaysia
building	UKM Institutional Repository
collection	Online Access
language	English
description	The emission of Extreme Ultra Violet (EUV) from plasma produced by vacuum spark discharge using stainless steel as anode material was investigated. The operating pressure for all the experiments carried out was maintained at below 10-4 mbar. The discharge voltage tested was from 8 kV to 20 kV. The inter-electrode distance suitable for high intensity and reproducible EUV emissions was found to be in the range of 2.6 mm to 4.6 mm. The output EUV energy scaled as ~ V02, where V0 is the discharge voltage.
format	Article
author	Saboohi, S Yap, S·L Chan, L·S Wong, C·S
spellingShingle	Saboohi, S Yap, S·L Chan, L·S Wong, C·S Effects of inter-electrode gap and discharge voltage on EUV emission from stainless steel vacuum spark plasma
author_facet	Saboohi, S Yap, S·L Chan, L·S Wong, C·S
author_sort	Saboohi, S
title	Effects of inter-electrode gap and discharge voltage on EUV emission from stainless steel vacuum spark plasma
title_short	Effects of inter-electrode gap and discharge voltage on EUV emission from stainless steel vacuum spark plasma
title_full	Effects of inter-electrode gap and discharge voltage on EUV emission from stainless steel vacuum spark plasma
title_fullStr	Effects of inter-electrode gap and discharge voltage on EUV emission from stainless steel vacuum spark plasma
title_full_unstemmed	Effects of inter-electrode gap and discharge voltage on EUV emission from stainless steel vacuum spark plasma
title_sort	effects of inter-electrode gap and discharge voltage on euv emission from stainless steel vacuum spark plasma
publisher	Universiti Kebangsaan Malaysia
publishDate	2012
url	http://journalarticle.ukm.my/5301/ http://journalarticle.ukm.my/5301/ http://journalarticle.ukm.my/5301/1/10%2520S%2520Saboohi.pdf
first_indexed	2023-09-18T19:43:45Z
last_indexed	2023-09-18T19:43:45Z
_version_	1777405762701623296

Effects of inter-electrode gap and discharge voltage on EUV emission from stainless steel vacuum spark plasma

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