Formation of porous silicon: mechanism of macropores formation in n-type si

We report the formation of macropores in n-Si (100) substrates for different etching times of 20, 40 and 60 min at a constant current density of 25 mA/cm2 under front-side illumination in HF:ethanol (1:4) solution. After etching for 20 min, four-branch-shaped pores of various sizes were observed at...

Full description

Bibliographic Details
Main Authors:	Nurul Izni Rusli, Mastura Shafinaz Zainal Abidin, Budi Astuti, Nihad K. Ali
Format:	Article
Language:	English
Published:	Universiti Kebangsaan Malaysia 2013
Online Access:	http://journalarticle.ukm.my/6158/ http://journalarticle.ukm.my/6158/ http://journalarticle.ukm.my/6158/1/12_Nurul_Izni.pdf

id	ukm-6158
recordtype	eprints
spelling	ukm-61582016-12-14T06:40:30Z http://journalarticle.ukm.my/6158/ Formation of porous silicon: mechanism of macropores formation in n-type si Nurul Izni Rusli, Mastura Shafinaz Zainal Abidin, Budi Astuti, Nihad K. Ali, We report the formation of macropores in n-Si (100) substrates for different etching times of 20, 40 and 60 min at a constant current density of 25 mA/cm2 under front-side illumination in HF:ethanol (1:4) solution. After etching for 20 min, four-branch-shaped pores of various sizes were observed at discrete locations. Etching time of 40 min led to the formation of highly connected four-branch-shaped pores as the branches of adjacent pores appeared to connect to each other. As the etching time was increased further to 60 min, the density of interconnected branches increased remarkably. The macropore formation process occurred in three consecutive phases. The current burst model was used to discuss this process. Formation of four-branch-shaped pores at random locations were observed because current bursts are more likely to nucleate where other current bursts took place initially. Universiti Kebangsaan Malaysia 2013-05 Article PeerReviewed application/pdf en http://journalarticle.ukm.my/6158/1/12_Nurul_Izni.pdf Nurul Izni Rusli, and Mastura Shafinaz Zainal Abidin, and Budi Astuti, and Nihad K. Ali, (2013) Formation of porous silicon: mechanism of macropores formation in n-type si. Sains Malaysiana, 42 (5). pp. 643-648. ISSN 0126-6039 http://www.ukm.my/jsm/
repository_type	Digital Repository
institution_category	Local University
institution	Universiti Kebangasaan Malaysia
building	UKM Institutional Repository
collection	Online Access
language	English
description	We report the formation of macropores in n-Si (100) substrates for different etching times of 20, 40 and 60 min at a constant current density of 25 mA/cm2 under front-side illumination in HF:ethanol (1:4) solution. After etching for 20 min, four-branch-shaped pores of various sizes were observed at discrete locations. Etching time of 40 min led to the formation of highly connected four-branch-shaped pores as the branches of adjacent pores appeared to connect to each other. As the etching time was increased further to 60 min, the density of interconnected branches increased remarkably. The macropore formation process occurred in three consecutive phases. The current burst model was used to discuss this process. Formation of four-branch-shaped pores at random locations were observed because current bursts are more likely to nucleate where other current bursts took place initially.
format	Article
author	Nurul Izni Rusli, Mastura Shafinaz Zainal Abidin, Budi Astuti, Nihad K. Ali,
spellingShingle	Nurul Izni Rusli, Mastura Shafinaz Zainal Abidin, Budi Astuti, Nihad K. Ali, Formation of porous silicon: mechanism of macropores formation in n-type si
author_facet	Nurul Izni Rusli, Mastura Shafinaz Zainal Abidin, Budi Astuti, Nihad K. Ali,
author_sort	Nurul Izni Rusli,
title	Formation of porous silicon: mechanism of macropores formation in n-type si
title_short	Formation of porous silicon: mechanism of macropores formation in n-type si
title_full	Formation of porous silicon: mechanism of macropores formation in n-type si
title_fullStr	Formation of porous silicon: mechanism of macropores formation in n-type si
title_full_unstemmed	Formation of porous silicon: mechanism of macropores formation in n-type si
title_sort	formation of porous silicon: mechanism of macropores formation in n-type si
publisher	Universiti Kebangsaan Malaysia
publishDate	2013
url	http://journalarticle.ukm.my/6158/ http://journalarticle.ukm.my/6158/ http://journalarticle.ukm.my/6158/1/12_Nurul_Izni.pdf
first_indexed	2023-09-18T19:46:08Z
last_indexed	2023-09-18T19:46:08Z
_version_	1777405912568299520

Formation of porous silicon: mechanism of macropores formation in n-type si

Similar Items