Formation of porous silicon: mechanism of macropores formation in n-type si
We report the formation of macropores in n-Si (100) substrates for different etching times of 20, 40 and 60 min at a constant current density of 25 mA/cm2 under front-side illumination in HF:ethanol (1:4) solution. After etching for 20 min, four-branch-shaped pores of various sizes were observed at...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Universiti Kebangsaan Malaysia
2013
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| Online Access: | http://journalarticle.ukm.my/6158/ http://journalarticle.ukm.my/6158/ http://journalarticle.ukm.my/6158/1/12_Nurul_Izni.pdf |