Microstructural characterization of Au-In Thin film deposited by electron beam evaporation

The microstructure and phase formation of Au-In thin film deposited by e-beam evaporation technique has been studied. Single crystals of rocksalt were used as the substrates. The chamber pressure during deposition was about 2.5  10-5 torr and substrate temperature was 35ºC. Three types of samples...

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Main Authors: Norliza Ismail, Muhammad Azmi Abdul Hamid, Azman Jalar
Format: Article
Language:English
Published: Universiti Kebangsaan Malaysia 2009
Online Access:http://journalarticle.ukm.my/62/
http://journalarticle.ukm.my/62/
http://journalarticle.ukm.my/62/1/
id ukm-62
recordtype eprints
spelling ukm-622016-12-14T06:26:17Z http://journalarticle.ukm.my/62/ Microstructural characterization of Au-In Thin film deposited by electron beam evaporation Norliza Ismail, Muhammad Azmi Abdul Hamid, Azman Jalar, The microstructure and phase formation of Au-In thin film deposited by e-beam evaporation technique has been studied. Single crystals of rocksalt were used as the substrates. The chamber pressure during deposition was about 2.5  10-5 torr and substrate temperature was 35ºC. Three types of samples were prepared namely Au, In and Au-In thin films. Microstructure and chemical composition of these thin films were characterized by transmission electron microscopy (TEM) and X-ray photoelectron spectrometer (XPS) respectively. TEM micrograph reveals island structures for both Au and In thin film on the rocksalt substrate, with the In island size distribution is about 9-30 nm compared to Au island in the range of 3-10 nm. The growth of islands instead of smooth film indicates that Au and In thin films follow the Volmer- Weber growth mode. However, island structures were not present on Au-In thin films which most probably follow the Frank van de Merwe growth mode. XPS analysis indicates intermetallic compound was not present in the Au-In thin film suggesting that diffusion process in the interface of Au and In films is minimal. Universiti Kebangsaan Malaysia 2009-02 Article PeerReviewed application/pdf en http://journalarticle.ukm.my/62/1/ Norliza Ismail, and Muhammad Azmi Abdul Hamid, and Azman Jalar, (2009) Microstructural characterization of Au-In Thin film deposited by electron beam evaporation. Sains Malaysiana, 38 (1). pp. 91-94. ISSN 0126-6039 http://www.ukm.my/~jsm/utama.html
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language English
description The microstructure and phase formation of Au-In thin film deposited by e-beam evaporation technique has been studied. Single crystals of rocksalt were used as the substrates. The chamber pressure during deposition was about 2.5  10-5 torr and substrate temperature was 35ºC. Three types of samples were prepared namely Au, In and Au-In thin films. Microstructure and chemical composition of these thin films were characterized by transmission electron microscopy (TEM) and X-ray photoelectron spectrometer (XPS) respectively. TEM micrograph reveals island structures for both Au and In thin film on the rocksalt substrate, with the In island size distribution is about 9-30 nm compared to Au island in the range of 3-10 nm. The growth of islands instead of smooth film indicates that Au and In thin films follow the Volmer- Weber growth mode. However, island structures were not present on Au-In thin films which most probably follow the Frank van de Merwe growth mode. XPS analysis indicates intermetallic compound was not present in the Au-In thin film suggesting that diffusion process in the interface of Au and In films is minimal.
format Article
author Norliza Ismail,
Muhammad Azmi Abdul Hamid,
Azman Jalar,
spellingShingle Norliza Ismail,
Muhammad Azmi Abdul Hamid,
Azman Jalar,
Microstructural characterization of Au-In Thin film deposited by electron beam evaporation
author_facet Norliza Ismail,
Muhammad Azmi Abdul Hamid,
Azman Jalar,
author_sort Norliza Ismail,
title Microstructural characterization of Au-In Thin film deposited by electron beam evaporation
title_short Microstructural characterization of Au-In Thin film deposited by electron beam evaporation
title_full Microstructural characterization of Au-In Thin film deposited by electron beam evaporation
title_fullStr Microstructural characterization of Au-In Thin film deposited by electron beam evaporation
title_full_unstemmed Microstructural characterization of Au-In Thin film deposited by electron beam evaporation
title_sort microstructural characterization of au-in thin film deposited by electron beam evaporation
publisher Universiti Kebangsaan Malaysia
publishDate 2009
url http://journalarticle.ukm.my/62/
http://journalarticle.ukm.my/62/
http://journalarticle.ukm.my/62/1/
first_indexed 2023-09-18T19:01:09Z
last_indexed 2023-09-18T19:01:09Z
_version_ 1777403082301243392