Effects of annealing conditions on the surface morphology and crystallinity of sputtered ZnO nano films

The effects of annealing parameters on crystallinity and surface morphology of RF sputtered zinc oxide nano films were investigated. The structure and morphology of the nano films were dependent on temperature, gas flow rate and time of annealing. The results from atomic force microscopy (AFM), fiel...

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Main Authors:	J. Karamdel, C.F. Dee, B. Yeop Majlis
Format:	Article
Language:	English
Published:	Universiti Kebangsaan Malaysia 2011
Online Access:	http://journalarticle.ukm.my/699/ http://journalarticle.ukm.my/699/ http://journalarticle.ukm.my/699/1/03_Javad_Karamdel.pdf

id	ukm-699
recordtype	eprints
spelling	ukm-6992016-12-14T06:27:55Z http://journalarticle.ukm.my/699/ Effects of annealing conditions on the surface morphology and crystallinity of sputtered ZnO nano films J. Karamdel, C.F. Dee, B. Yeop Majlis, The effects of annealing parameters on crystallinity and surface morphology of RF sputtered zinc oxide nano films were investigated. The structure and morphology of the nano films were dependent on temperature, gas flow rate and time of annealing. The results from atomic force microscopy (AFM), field emission scanning electron microscopy (FESEM) and X-ray diffraction (XRD) showed smooth and uniform growth of c-axis orientation films with an average grain sizes from 10 to 30 nm. Increments of the annealing temperature from 400 to 800°C led to bigger grain size, better crystallinity and also increase of the surface roughness. Moreover, the results showed that the crystallinity was independent of the annealing time up to 40 min after starting the annealing process. Increase in the percentage of oxygen in the O/Ar (mixture of annealing gases) from 50% to 100% results in no changes in AFM results, but XRD revealed that the (100) peak intensity was decreased, the position of (002) peak was slightly shifted towards higher angle and FWHM of (002) peak was improved. Universiti Kebangsaan Malaysia 2011-03 Article PeerReviewed application/pdf en http://journalarticle.ukm.my/699/1/03_Javad_Karamdel.pdf J. Karamdel, and C.F. Dee, and B. Yeop Majlis, (2011) Effects of annealing conditions on the surface morphology and crystallinity of sputtered ZnO nano films. Sains Malaysiana, 40 (3). pp. 209-213. ISSN 0126-6039 http://www.ukm.my/jsm/
repository_type	Digital Repository
institution_category	Local University
institution	Universiti Kebangasaan Malaysia
building	UKM Institutional Repository
collection	Online Access
language	English
description	The effects of annealing parameters on crystallinity and surface morphology of RF sputtered zinc oxide nano films were investigated. The structure and morphology of the nano films were dependent on temperature, gas flow rate and time of annealing. The results from atomic force microscopy (AFM), field emission scanning electron microscopy (FESEM) and X-ray diffraction (XRD) showed smooth and uniform growth of c-axis orientation films with an average grain sizes from 10 to 30 nm. Increments of the annealing temperature from 400 to 800°C led to bigger grain size, better crystallinity and also increase of the surface roughness. Moreover, the results showed that the crystallinity was independent of the annealing time up to 40 min after starting the annealing process. Increase in the percentage of oxygen in the O/Ar (mixture of annealing gases) from 50% to 100% results in no changes in AFM results, but XRD revealed that the (100) peak intensity was decreased, the position of (002) peak was slightly shifted towards higher angle and FWHM of (002) peak was improved.
format	Article
author	J. Karamdel, C.F. Dee, B. Yeop Majlis,
spellingShingle	J. Karamdel, C.F. Dee, B. Yeop Majlis, Effects of annealing conditions on the surface morphology and crystallinity of sputtered ZnO nano films
author_facet	J. Karamdel, C.F. Dee, B. Yeop Majlis,
author_sort	J. Karamdel,
title	Effects of annealing conditions on the surface morphology and crystallinity of sputtered ZnO nano films
title_short	Effects of annealing conditions on the surface morphology and crystallinity of sputtered ZnO nano films
title_full	Effects of annealing conditions on the surface morphology and crystallinity of sputtered ZnO nano films
title_fullStr	Effects of annealing conditions on the surface morphology and crystallinity of sputtered ZnO nano films
title_full_unstemmed	Effects of annealing conditions on the surface morphology and crystallinity of sputtered ZnO nano films
title_sort	effects of annealing conditions on the surface morphology and crystallinity of sputtered zno nano films
publisher	Universiti Kebangsaan Malaysia
publishDate	2011
url	http://journalarticle.ukm.my/699/ http://journalarticle.ukm.my/699/ http://journalarticle.ukm.my/699/1/03_Javad_Karamdel.pdf
first_indexed	2023-09-18T19:31:33Z
last_indexed	2023-09-18T19:31:33Z
_version_	1777404994553643008

Effects of annealing conditions on the surface morphology and crystallinity of sputtered ZnO nano films

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