Effects of annealing conditions on the surface morphology and crystallinity of sputtered ZnO nano films
The effects of annealing parameters on crystallinity and surface morphology of RF sputtered zinc oxide nano films were investigated. The structure and morphology of the nano films were dependent on temperature, gas flow rate and time of annealing. The results from atomic force microscopy (AFM), fiel...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Universiti Kebangsaan Malaysia
2011
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| Online Access: | http://journalarticle.ukm.my/699/ http://journalarticle.ukm.my/699/ http://journalarticle.ukm.my/699/1/03_Javad_Karamdel.pdf |