Yong, C. P. (2010). Feasible laser parameters in fabrication of MEMS structures on silicon.
Chicago Style (17th ed.) CitationYong, Chee Ping. Feasible Laser Parameters in Fabrication of MEMS Structures on Silicon. 2010.
MLA (8th ed.) CitationYong, Chee Ping. Feasible Laser Parameters in Fabrication of MEMS Structures on Silicon. 2010.
Warning: These citations may not always be 100% accurate.