Design Optimization and Analysis of Proof Mass Actuation for MEMS Accelerometer: A Simulation Study

In this paper, we present the design and analysis of the proof mass for capacitive based MEMS accelerometers. A study was done to determine the parameters (length of hinge and number of combs) to be optimized for the MEMS accelerometer design. The proposed design can measure the acceleration in xx-,...

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Main Authors:	Narayanamurthy, Vigneswaran, Lakshminarayanan, Sujatha, Yacin, S. Mohamed, Fahmi, Samsuri
Format:	Article
Language:	English
Published:	World Scientific Publishing Co Pte Ltd 2017
Subjects:	TK Electrical engineering. Electronics Nuclear engineering
Online Access:	http://umpir.ump.edu.my/id/eprint/16921/ http://umpir.ump.edu.my/id/eprint/16921/ http://umpir.ump.edu.my/id/eprint/16921/ http://umpir.ump.edu.my/id/eprint/16921/1/fkee-2017-Vigneswaran-Design%20optimization1.pdf

id	ump-16921
recordtype	eprints
spelling	ump-169212018-05-16T07:51:40Z http://umpir.ump.edu.my/id/eprint/16921/ Design Optimization and Analysis of Proof Mass Actuation for MEMS Accelerometer: A Simulation Study Narayanamurthy, Vigneswaran Lakshminarayanan, Sujatha Yacin, S. Mohamed Fahmi, Samsuri TK Electrical engineering. Electronics Nuclear engineering In this paper, we present the design and analysis of the proof mass for capacitive based MEMS accelerometers. A study was done to determine the parameters (length of hinge and number of combs) to be optimized for the MEMS accelerometer design. The proposed design can measure the acceleration in xx-, yy- and zz-axes. The design features a proof mass with interdigitated fingers along each side. These interdigitated fingers act as parallel plate capacitors. Due to acceleration, capacitance changes along the comb drive. This change in capacitance can be used to monitor the acceleration. Analysis has been carried out with different comb width designs. Using the MEMS CAD tool CoventorWare, the structure has been designed, simulated and analyzed. The process flow for the fabrication has also been proposed for the above structure. Comparative study with several designs has been made and the efficient design parameters to be considered while designing MEMS accelerometer were proposed. Based on the study, a set of optimized design parameters for the comb accelerometer were reported. World Scientific Publishing Co Pte Ltd 2017 Article PeerReviewed application/pdf en http://umpir.ump.edu.my/id/eprint/16921/1/fkee-2017-Vigneswaran-Design%20optimization1.pdf Narayanamurthy, Vigneswaran and Lakshminarayanan, Sujatha and Yacin, S. Mohamed and Fahmi, Samsuri (2017) Design Optimization and Analysis of Proof Mass Actuation for MEMS Accelerometer: A Simulation Study. Journal of Circuits, Systems and Computers, 26 (6). pp. 1-10. ISSN 0218-1266 (print); 1793-6454 (online) http://dx.doi.org/10.1142/S0218126617500955 doi: 10.1142/S0218126617500955
repository_type	Digital Repository
institution_category	Local University
institution	Universiti Malaysia Pahang
building	UMP Institutional Repository
collection	Online Access
language	English
topic	TK Electrical engineering. Electronics Nuclear engineering
spellingShingle	TK Electrical engineering. Electronics Nuclear engineering Narayanamurthy, Vigneswaran Lakshminarayanan, Sujatha Yacin, S. Mohamed Fahmi, Samsuri Design Optimization and Analysis of Proof Mass Actuation for MEMS Accelerometer: A Simulation Study
description	In this paper, we present the design and analysis of the proof mass for capacitive based MEMS accelerometers. A study was done to determine the parameters (length of hinge and number of combs) to be optimized for the MEMS accelerometer design. The proposed design can measure the acceleration in xx-, yy- and zz-axes. The design features a proof mass with interdigitated fingers along each side. These interdigitated fingers act as parallel plate capacitors. Due to acceleration, capacitance changes along the comb drive. This change in capacitance can be used to monitor the acceleration. Analysis has been carried out with different comb width designs. Using the MEMS CAD tool CoventorWare, the structure has been designed, simulated and analyzed. The process flow for the fabrication has also been proposed for the above structure. Comparative study with several designs has been made and the efficient design parameters to be considered while designing MEMS accelerometer were proposed. Based on the study, a set of optimized design parameters for the comb accelerometer were reported.
format	Article
author	Narayanamurthy, Vigneswaran Lakshminarayanan, Sujatha Yacin, S. Mohamed Fahmi, Samsuri
author_facet	Narayanamurthy, Vigneswaran Lakshminarayanan, Sujatha Yacin, S. Mohamed Fahmi, Samsuri
author_sort	Narayanamurthy, Vigneswaran
title	Design Optimization and Analysis of Proof Mass Actuation for MEMS Accelerometer: A Simulation Study
title_short	Design Optimization and Analysis of Proof Mass Actuation for MEMS Accelerometer: A Simulation Study
title_full	Design Optimization and Analysis of Proof Mass Actuation for MEMS Accelerometer: A Simulation Study
title_fullStr	Design Optimization and Analysis of Proof Mass Actuation for MEMS Accelerometer: A Simulation Study
title_full_unstemmed	Design Optimization and Analysis of Proof Mass Actuation for MEMS Accelerometer: A Simulation Study
title_sort	design optimization and analysis of proof mass actuation for mems accelerometer: a simulation study
publisher	World Scientific Publishing Co Pte Ltd
publishDate	2017
url	http://umpir.ump.edu.my/id/eprint/16921/ http://umpir.ump.edu.my/id/eprint/16921/ http://umpir.ump.edu.my/id/eprint/16921/ http://umpir.ump.edu.my/id/eprint/16921/1/fkee-2017-Vigneswaran-Design%20optimization1.pdf
first_indexed	2023-09-18T22:23:00Z
last_indexed	2023-09-18T22:23:00Z
_version_	1777415781980569600

Design Optimization and Analysis of Proof Mass Actuation for MEMS Accelerometer: A Simulation Study

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