Out-of-plane Characterization of Silicon-on-insulator Multiuser MEMS Processes-based Tri-axis Accelerometer

In this paper, we discuss the analysis of out-of-plane characterization of a capacitive tri-axis accelerometer fabricated using SOI MUMPS (Silicon-on Insulator Multi user MEMS Processes) process flow and the results are compared with simulated results. The device is designed with wide operational 3...

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Main Authors:	L., Sujatha, S., Kalaiselvi, Vigneswaran, Narayanamurthy
Format:	Article
Language:	English
Published:	IFSA Publishing, S.L. 2016
Subjects:	TK Electrical engineering. Electronics Nuclear engineering
Online Access:	http://umpir.ump.edu.my/id/eprint/16924/ http://umpir.ump.edu.my/id/eprint/16924/ http://umpir.ump.edu.my/id/eprint/16924/1/fkee-2016-vigneswaran-Out-of-plane%20Characterization.pdf

id	ump-16924
recordtype	eprints
spelling	ump-169242017-03-01T06:46:02Z http://umpir.ump.edu.my/id/eprint/16924/ Out-of-plane Characterization of Silicon-on-insulator Multiuser MEMS Processes-based Tri-axis Accelerometer L., Sujatha S., Kalaiselvi Vigneswaran, Narayanamurthy TK Electrical engineering. Electronics Nuclear engineering In this paper, we discuss the analysis of out-of-plane characterization of a capacitive tri-axis accelerometer fabricated using SOI MUMPS (Silicon-on Insulator Multi user MEMS Processes) process flow and the results are compared with simulated results. The device is designed with wide operational 3 dB bandwidth suitable for measuring vibrations in industrial applications. The wide operating range is obtained by optimizing serpentine flexures at the four corners of the proof mass. The accelerometer structure was simulated using COMSOL Multiphysics and the displacement sensitivity was observed as 1.2978 nm/g along z-axis. The simulated resonant frequency of the device was found to be 13 kHz along z axis. The dynamic characterization of the fabricated tri-axis accelerometer produces the out-of-plane vibration mode frequency as 13 kHz which is same as the simulated result obtained in z-axis. IFSA Publishing, S.L. 2016 Article PeerReviewed application/pdf en cc_by http://umpir.ump.edu.my/id/eprint/16924/1/fkee-2016-vigneswaran-Out-of-plane%20Characterization.pdf L., Sujatha and S., Kalaiselvi and Vigneswaran, Narayanamurthy (2016) Out-of-plane Characterization of Silicon-on-insulator Multiuser MEMS Processes-based Tri-axis Accelerometer. Sensors & Transducers, 205 (10). pp. 63-71. ISSN 2306-8515 (print); 1726-5479 (online) http://www.sensorsportal.com/HTML/DIGEST/P_RP_2016.htm
repository_type	Digital Repository
institution_category	Local University
institution	Universiti Malaysia Pahang
building	UMP Institutional Repository
collection	Online Access
language	English
topic	TK Electrical engineering. Electronics Nuclear engineering
spellingShingle	TK Electrical engineering. Electronics Nuclear engineering L., Sujatha S., Kalaiselvi Vigneswaran, Narayanamurthy Out-of-plane Characterization of Silicon-on-insulator Multiuser MEMS Processes-based Tri-axis Accelerometer
description	In this paper, we discuss the analysis of out-of-plane characterization of a capacitive tri-axis accelerometer fabricated using SOI MUMPS (Silicon-on Insulator Multi user MEMS Processes) process flow and the results are compared with simulated results. The device is designed with wide operational 3 dB bandwidth suitable for measuring vibrations in industrial applications. The wide operating range is obtained by optimizing serpentine flexures at the four corners of the proof mass. The accelerometer structure was simulated using COMSOL Multiphysics and the displacement sensitivity was observed as 1.2978 nm/g along z-axis. The simulated resonant frequency of the device was found to be 13 kHz along z axis. The dynamic characterization of the fabricated tri-axis accelerometer produces the out-of-plane vibration mode frequency as 13 kHz which is same as the simulated result obtained in z-axis.
format	Article
author	L., Sujatha S., Kalaiselvi Vigneswaran, Narayanamurthy
author_facet	L., Sujatha S., Kalaiselvi Vigneswaran, Narayanamurthy
author_sort	L., Sujatha
title	Out-of-plane Characterization of Silicon-on-insulator Multiuser MEMS Processes-based Tri-axis Accelerometer
title_short	Out-of-plane Characterization of Silicon-on-insulator Multiuser MEMS Processes-based Tri-axis Accelerometer
title_full	Out-of-plane Characterization of Silicon-on-insulator Multiuser MEMS Processes-based Tri-axis Accelerometer
title_fullStr	Out-of-plane Characterization of Silicon-on-insulator Multiuser MEMS Processes-based Tri-axis Accelerometer
title_full_unstemmed	Out-of-plane Characterization of Silicon-on-insulator Multiuser MEMS Processes-based Tri-axis Accelerometer
title_sort	out-of-plane characterization of silicon-on-insulator multiuser mems processes-based tri-axis accelerometer
publisher	IFSA Publishing, S.L.
publishDate	2016
url	http://umpir.ump.edu.my/id/eprint/16924/ http://umpir.ump.edu.my/id/eprint/16924/ http://umpir.ump.edu.my/id/eprint/16924/1/fkee-2016-vigneswaran-Out-of-plane%20Characterization.pdf
first_indexed	2023-09-18T22:23:01Z
last_indexed	2023-09-18T22:23:01Z
_version_	1777415782423068672

Out-of-plane Characterization of Silicon-on-insulator Multiuser MEMS Processes-based Tri-axis Accelerometer

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