Investigation of structural and optical properties of near surface of CdTe film induced by nitrogen plasma immersion ion implantation

Plasma immersion ion implantation (PIII) is an important technique for performing a shallow junction for microelectronic applications. This work describes the effect of nitrogen PIII on structural, morphological and optical properties of CdTe thin films. To optimize the implantation results, the exp...

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Main Authors:	Shaaban, Essam R., Metawa, A. E., Almohammedi, A., Algarni, H., Hassan, A. M., Ali, Gomaa A. M., Ashour, A.
Format:	Article
Language:	English
Published:	Institute of Physics Publishing 2018
Subjects:	Q Science (General)
Online Access:	http://umpir.ump.edu.my/id/eprint/22153/ http://umpir.ump.edu.my/id/eprint/22153/ http://umpir.ump.edu.my/id/eprint/22153/ http://umpir.ump.edu.my/id/eprint/22153/1/Investigation%20of%20structural%20and%20optical%20properties%20of%20near%20surface.pdf

id	ump-22153
recordtype	eprints
spelling	ump-221532018-09-21T02:49:13Z http://umpir.ump.edu.my/id/eprint/22153/ Investigation of structural and optical properties of near surface of CdTe film induced by nitrogen plasma immersion ion implantation Shaaban, Essam R. Metawa, A. E. Almohammedi, A. Algarni, H. Hassan, A. M. Ali, Gomaa A. M. Ashour, A. Q Science (General) Plasma immersion ion implantation (PIII) is an important technique for performing a shallow junction for microelectronic applications. This work describes the effect of nitrogen PIII on structural, morphological and optical properties of CdTe thin films. To optimize the implantation results, the experiments were carried out at different exposure times (0, 2.5, 5, 10, 15 min). Scanning electron microscopy (SEM) and energy dispersed x-ray (EDX) were used to investigate the surface morphology of CdTe implanted films. According to x-ray diffraction (XRD) analysis, a considerable change in structural parameters such as lattice parameter, internal stress, crystallite size and lattice strain are observed as a result of increasing the duration time of plasma immersion nitrogen ions implanted CdTe film. The energy gap ( ) values of implanted films were estimated in terms of the first derivative of absorbance with respect to wavelength and found to be decreased with increasing PIII exposure time. The reduction in values was explained and correlated with the change in microstructure parameters. Institute of Physics Publishing 2018 Article PeerReviewed pdf en http://umpir.ump.edu.my/id/eprint/22153/1/Investigation%20of%20structural%20and%20optical%20properties%20of%20near%20surface.pdf Shaaban, Essam R. and Metawa, A. E. and Almohammedi, A. and Algarni, H. and Hassan, A. M. and Ali, Gomaa A. M. and Ashour, A. (2018) Investigation of structural and optical properties of near surface of CdTe film induced by nitrogen plasma immersion ion implantation. Materials Research Express, 5 (8). ISSN 2053-1591 https://doi.org/10.1088/2053-1591/aad1bf doi: 10.1088/2053-1591/aad1bf
repository_type	Digital Repository
institution_category	Local University
institution	Universiti Malaysia Pahang
building	UMP Institutional Repository
collection	Online Access
language	English
topic	Q Science (General)
spellingShingle	Q Science (General) Shaaban, Essam R. Metawa, A. E. Almohammedi, A. Algarni, H. Hassan, A. M. Ali, Gomaa A. M. Ashour, A. Investigation of structural and optical properties of near surface of CdTe film induced by nitrogen plasma immersion ion implantation
description	Plasma immersion ion implantation (PIII) is an important technique for performing a shallow junction for microelectronic applications. This work describes the effect of nitrogen PIII on structural, morphological and optical properties of CdTe thin films. To optimize the implantation results, the experiments were carried out at different exposure times (0, 2.5, 5, 10, 15 min). Scanning electron microscopy (SEM) and energy dispersed x-ray (EDX) were used to investigate the surface morphology of CdTe implanted films. According to x-ray diffraction (XRD) analysis, a considerable change in structural parameters such as lattice parameter, internal stress, crystallite size and lattice strain are observed as a result of increasing the duration time of plasma immersion nitrogen ions implanted CdTe film. The energy gap ( ) values of implanted films were estimated in terms of the first derivative of absorbance with respect to wavelength and found to be decreased with increasing PIII exposure time. The reduction in values was explained and correlated with the change in microstructure parameters.
format	Article
author	Shaaban, Essam R. Metawa, A. E. Almohammedi, A. Algarni, H. Hassan, A. M. Ali, Gomaa A. M. Ashour, A.
author_facet	Shaaban, Essam R. Metawa, A. E. Almohammedi, A. Algarni, H. Hassan, A. M. Ali, Gomaa A. M. Ashour, A.
author_sort	Shaaban, Essam R.
title	Investigation of structural and optical properties of near surface of CdTe film induced by nitrogen plasma immersion ion implantation
title_short	Investigation of structural and optical properties of near surface of CdTe film induced by nitrogen plasma immersion ion implantation
title_full	Investigation of structural and optical properties of near surface of CdTe film induced by nitrogen plasma immersion ion implantation
title_fullStr	Investigation of structural and optical properties of near surface of CdTe film induced by nitrogen plasma immersion ion implantation
title_full_unstemmed	Investigation of structural and optical properties of near surface of CdTe film induced by nitrogen plasma immersion ion implantation
title_sort	investigation of structural and optical properties of near surface of cdte film induced by nitrogen plasma immersion ion implantation
publisher	Institute of Physics Publishing
publishDate	2018
url	http://umpir.ump.edu.my/id/eprint/22153/ http://umpir.ump.edu.my/id/eprint/22153/ http://umpir.ump.edu.my/id/eprint/22153/ http://umpir.ump.edu.my/id/eprint/22153/1/Investigation%20of%20structural%20and%20optical%20properties%20of%20near%20surface.pdf
first_indexed	2023-09-18T22:32:50Z
last_indexed	2023-09-18T22:32:50Z
_version_	1777416399814131712

Investigation of structural and optical properties of near surface of CdTe film induced by nitrogen plasma immersion ion implantation

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