Investigation of structural and optical properties of near surface of CdTe film induced by nitrogen plasma immersion ion implantation
Plasma immersion ion implantation (PIII) is an important technique for performing a shallow junction for microelectronic applications. This work describes the effect of nitrogen PIII on structural, morphological and optical properties of CdTe thin films. To optimize the implantation results, the exp...
| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Institute of Physics Publishing
2018
|
| Subjects: | |
| Online Access: | http://umpir.ump.edu.my/id/eprint/22153/ http://umpir.ump.edu.my/id/eprint/22153/ http://umpir.ump.edu.my/id/eprint/22153/ http://umpir.ump.edu.my/id/eprint/22153/1/Investigation%20of%20structural%20and%20optical%20properties%20of%20near%20surface.pdf |