On Generation of Micro-Feature on Silicon with an Industrial Laser

Generation of a micro feature on mono-crystalline silicon surface using an industrial laser is presented. The main objective is to investigate the capability of the industrial laser, Nd:YAG, in generating a micro-feature on silicon surface. The unpolished silicon surface was irradiated with the Nd:Y...

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Main Authors:	M., Ishak, Thet, Thet Mon, Noriah, Bidin, Yap, Tze Chuen
Format:	Article
Language:	English
Published:	Trans Tech Publications 2014
Subjects:	TJ Mechanical engineering and machinery
Online Access:	http://umpir.ump.edu.my/id/eprint/4586/ http://umpir.ump.edu.my/id/eprint/4586/ http://umpir.ump.edu.my/id/eprint/4586/ http://umpir.ump.edu.my/id/eprint/4586/1/On_generation_of_micro_feature_on_silicon_with_an_industrial_laser_Materials_science_forum_%282014%29.pdf

id	ump-4586
recordtype	eprints
spelling	ump-45862015-06-23T07:19:35Z http://umpir.ump.edu.my/id/eprint/4586/ On Generation of Micro-Feature on Silicon with an Industrial Laser M., Ishak Thet, Thet Mon Noriah, Bidin Yap, Tze Chuen TJ Mechanical engineering and machinery Generation of a micro feature on mono-crystalline silicon surface using an industrial laser is presented. The main objective is to investigate the capability of the industrial laser, Nd:YAG, in generating a micro-feature on silicon surface. The unpolished silicon surface was irradiated with the Nd:YAG laser beam of controlled pulse width and power. In phase 1, the irradiations were done without incorporating an assist gas into the process. In phase 2, the compressed air maintaining its pressure at 4 bars, was supplied as an assist gas during laser irradiation. Design of experiment was adopted to systematically determine the number of experimental runs in each phase as well as to fine tune the important parameters through the statistical analysis. Laser-generated structures were observed under scanning electron microscope. Micrographs reveal that most of the features appear to be cone-like with an almost true circle at the base. The diameter of the cone is found to be as small as 200 µm. The quality of such micro-features and analysis of the effect of the process parameters on the feature quality show that in general, laser pulse width has more appreciable effect than the laser power on the micro-feature geometry as well as quality. Laser irradiation without the assist gas produces better results in terms of a feature size. Trans Tech Publications 2014 Article PeerReviewed application/pdf en http://umpir.ump.edu.my/id/eprint/4586/1/On_generation_of_micro_feature_on_silicon_with_an_industrial_laser_Materials_science_forum_%282014%29.pdf M., Ishak and Thet, Thet Mon and Noriah, Bidin and Yap, Tze Chuen (2014) On Generation of Micro-Feature on Silicon with an Industrial Laser. Materials Science Forum, 773 - . pp. 661-669. ISSN 0255-5476 http://dx.doi.org/10.4028/www.scientific.net/MSF.773-774.661 DOI: 10.4028/www.scientific.net/MSF.773-774.661
repository_type	Digital Repository
institution_category	Local University
institution	Universiti Malaysia Pahang
building	UMP Institutional Repository
collection	Online Access
language	English
topic	TJ Mechanical engineering and machinery
spellingShingle	TJ Mechanical engineering and machinery M., Ishak Thet, Thet Mon Noriah, Bidin Yap, Tze Chuen On Generation of Micro-Feature on Silicon with an Industrial Laser
description	Generation of a micro feature on mono-crystalline silicon surface using an industrial laser is presented. The main objective is to investigate the capability of the industrial laser, Nd:YAG, in generating a micro-feature on silicon surface. The unpolished silicon surface was irradiated with the Nd:YAG laser beam of controlled pulse width and power. In phase 1, the irradiations were done without incorporating an assist gas into the process. In phase 2, the compressed air maintaining its pressure at 4 bars, was supplied as an assist gas during laser irradiation. Design of experiment was adopted to systematically determine the number of experimental runs in each phase as well as to fine tune the important parameters through the statistical analysis. Laser-generated structures were observed under scanning electron microscope. Micrographs reveal that most of the features appear to be cone-like with an almost true circle at the base. The diameter of the cone is found to be as small as 200 µm. The quality of such micro-features and analysis of the effect of the process parameters on the feature quality show that in general, laser pulse width has more appreciable effect than the laser power on the micro-feature geometry as well as quality. Laser irradiation without the assist gas produces better results in terms of a feature size.
format	Article
author	M., Ishak Thet, Thet Mon Noriah, Bidin Yap, Tze Chuen
author_facet	M., Ishak Thet, Thet Mon Noriah, Bidin Yap, Tze Chuen
author_sort	M., Ishak
title	On Generation of Micro-Feature on Silicon with an Industrial Laser
title_short	On Generation of Micro-Feature on Silicon with an Industrial Laser
title_full	On Generation of Micro-Feature on Silicon with an Industrial Laser
title_fullStr	On Generation of Micro-Feature on Silicon with an Industrial Laser
title_full_unstemmed	On Generation of Micro-Feature on Silicon with an Industrial Laser
title_sort	on generation of micro-feature on silicon with an industrial laser
publisher	Trans Tech Publications
publishDate	2014
url	http://umpir.ump.edu.my/id/eprint/4586/ http://umpir.ump.edu.my/id/eprint/4586/ http://umpir.ump.edu.my/id/eprint/4586/ http://umpir.ump.edu.my/id/eprint/4586/1/On_generation_of_micro_feature_on_silicon_with_an_industrial_laser_Materials_science_forum_%282014%29.pdf
first_indexed	2023-09-18T21:59:18Z
last_indexed	2023-09-18T21:59:18Z
_version_	1777414290658033664

On Generation of Micro-Feature on Silicon with an Industrial Laser

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