Correlation Between the Microstructure of Copper Oxide Thin Film and Its Gas Sensing Response

Copper oxide gas sensor was prepared on silicon wafer by sputtering of copper target at different oxygen flow rate of 0, 4, 8 and 16 sccm using RF magnetron sputtering technique. Argon flow rate, RF power, working pressure and substrate bias voltage were fixed at 50 sccm, 400 W, 22.5 mTorr and −40 V...

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Main Authors:	Ahmad Faizal, Mohd Zain, Jia, Wei Low, Nafarizal, Nayan, Mohd Zainizan, Sahdan, Mohd Khairul, Ahmad, Ali Yeon, Md Shakaff, Ammar, Zakaria
Format:	Conference or Workshop Item
Language:	English
Published:	2014
Subjects:	TS Manufactures
Online Access:	http://umpir.ump.edu.my/id/eprint/7371/ http://umpir.ump.edu.my/id/eprint/7371/ http://umpir.ump.edu.my/id/eprint/7371/1/Correlation_between_the_microstructure_of_copper_oxide_thin_film_and_its_gas_sensing_response.pdf

id	ump-7371
recordtype	eprints
spelling	ump-73712016-04-20T01:23:07Z http://umpir.ump.edu.my/id/eprint/7371/ Correlation Between the Microstructure of Copper Oxide Thin Film and Its Gas Sensing Response Ahmad Faizal, Mohd Zain Jia, Wei Low Nafarizal, Nayan Mohd Zainizan, Sahdan Mohd Khairul, Ahmad Ali Yeon, Md Shakaff Ammar, Zakaria TS Manufactures Copper oxide gas sensor was prepared on silicon wafer by sputtering of copper target at different oxygen flow rate of 0, 4, 8 and 16 sccm using RF magnetron sputtering technique. Argon flow rate, RF power, working pressure and substrate bias voltage were fixed at 50 sccm, 400 W, 22.5 mTorr and −40 V, respectively. The effect of varying the oxygen flow rate towards the time response of the copper oxide gas sensor was investigated. In addition, the influence of the copper oxide thin films microstructure and I-V characteristic was also considered. Based on the result, copper oxide gas sensor fabricated at 8 sccm of oxygen flow rate provide a better response of 0.024V/s compare to those fabricated at 0, 4 and 16 sccm. 2014 Conference or Workshop Item PeerReviewed application/pdf en http://umpir.ump.edu.my/id/eprint/7371/1/Correlation_between_the_microstructure_of_copper_oxide_thin_film_and_its_gas_sensing_response.pdf Ahmad Faizal, Mohd Zain and Jia, Wei Low and Nafarizal, Nayan and Mohd Zainizan, Sahdan and Mohd Khairul, Ahmad and Ali Yeon, Md Shakaff and Ammar, Zakaria (2014) Correlation Between the Microstructure of Copper Oxide Thin Film and Its Gas Sensing Response. In: Proceedings of the IEEE International Conference on Semiconductor Electronics (ICSE 2014)), 27-29 August 2014 , Kuala Lumpur. pp. 32-35.. http://dx.doi.org/10.1109/SMELEC.2014.6920788
repository_type	Digital Repository
institution_category	Local University
institution	Universiti Malaysia Pahang
building	UMP Institutional Repository
collection	Online Access
language	English
topic	TS Manufactures
spellingShingle	TS Manufactures Ahmad Faizal, Mohd Zain Jia, Wei Low Nafarizal, Nayan Mohd Zainizan, Sahdan Mohd Khairul, Ahmad Ali Yeon, Md Shakaff Ammar, Zakaria Correlation Between the Microstructure of Copper Oxide Thin Film and Its Gas Sensing Response
description	Copper oxide gas sensor was prepared on silicon wafer by sputtering of copper target at different oxygen flow rate of 0, 4, 8 and 16 sccm using RF magnetron sputtering technique. Argon flow rate, RF power, working pressure and substrate bias voltage were fixed at 50 sccm, 400 W, 22.5 mTorr and −40 V, respectively. The effect of varying the oxygen flow rate towards the time response of the copper oxide gas sensor was investigated. In addition, the influence of the copper oxide thin films microstructure and I-V characteristic was also considered. Based on the result, copper oxide gas sensor fabricated at 8 sccm of oxygen flow rate provide a better response of 0.024V/s compare to those fabricated at 0, 4 and 16 sccm.
format	Conference or Workshop Item
author	Ahmad Faizal, Mohd Zain Jia, Wei Low Nafarizal, Nayan Mohd Zainizan, Sahdan Mohd Khairul, Ahmad Ali Yeon, Md Shakaff Ammar, Zakaria
author_facet	Ahmad Faizal, Mohd Zain Jia, Wei Low Nafarizal, Nayan Mohd Zainizan, Sahdan Mohd Khairul, Ahmad Ali Yeon, Md Shakaff Ammar, Zakaria
author_sort	Ahmad Faizal, Mohd Zain
title	Correlation Between the Microstructure of Copper Oxide Thin Film and Its Gas Sensing Response
title_short	Correlation Between the Microstructure of Copper Oxide Thin Film and Its Gas Sensing Response
title_full	Correlation Between the Microstructure of Copper Oxide Thin Film and Its Gas Sensing Response
title_fullStr	Correlation Between the Microstructure of Copper Oxide Thin Film and Its Gas Sensing Response
title_full_unstemmed	Correlation Between the Microstructure of Copper Oxide Thin Film and Its Gas Sensing Response
title_sort	correlation between the microstructure of copper oxide thin film and its gas sensing response
publishDate	2014
url	http://umpir.ump.edu.my/id/eprint/7371/ http://umpir.ump.edu.my/id/eprint/7371/ http://umpir.ump.edu.my/id/eprint/7371/1/Correlation_between_the_microstructure_of_copper_oxide_thin_film_and_its_gas_sensing_response.pdf
first_indexed	2023-09-18T22:03:59Z
last_indexed	2023-09-18T22:03:59Z
_version_	1777414585201983488

Correlation Between the Microstructure of Copper Oxide Thin Film and Its Gas Sensing Response

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