Improving Physical Properties of Nano Layered ITO Thin Films by using a Novel Oil Thermal Annealing
Indium tin oxide (ITO) thin film were deposited on glass substrates by RF sputtering technique, followed by two treatment techniques which are Oil thermal annealing (OTA) and Argon Gas. Atomic Force Microscopy (AFM) and X-ray diffraction were used to analysis the surface morphology and structure of...
| Main Authors: | , , , , |
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| Format: | Article |
| Published: |
Landesmuseum Kärnten
2014
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| Subjects: | |
| Online Access: | http://umpir.ump.edu.my/id/eprint/8135/ http://umpir.ump.edu.my/id/eprint/8135/ |