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Sabar Hutagalung, D.
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Sabar Hutagalung, D.
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Sabar Hutagalung, D.
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Effect of TMAH etching duration on the formation of silicon nanowire transistor patterned by AFM nanolithography
by
Sabar
Hutagalung
,
D
.
,
Kam Lew, C.
Published 2012
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