Design and modelling of an impedance-based MEMS biosensor
This paper present the preliminary design of a micro-electromechanical system (MEMS) surface acoustic wave (SAW) resonator as a biosensor using COMSOL. The biosensor consists of a SAW resonator which utilizes mechanical acoustic waves as its sensing mechanism. The preliminary study was performed to...
| Main Authors: | , , |
|---|---|
| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2011
|
| Subjects: | |
| Online Access: | http://irep.iium.edu.my/15123/ http://irep.iium.edu.my/15123/ http://irep.iium.edu.my/15123/1/06088352.pdf |