Quality of copper film electroplated on silicon wafer using different current densities
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| Format: | Book Chapter |
| Language: | English |
| Published: |
IIUM Press
2011
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| Online Access: | http://irep.iium.edu.my/19027/ http://irep.iium.edu.my/19027/ http://irep.iium.edu.my/19027/1/Chapter_6.pdf |