Quality of copper film electroplated on silicon wafer using different current densities

Quality of copper film electroplated on silicon wafer using different current densities

Bibliographic Details
Main Author:	Mridha, Shahjahan
Format:	Book Chapter
Language:	English
Published:	IIUM Press 2011
Subjects:	TP1080 Polymers, plastics and their manufacture
Online Access:	http://irep.iium.edu.my/19027/ http://irep.iium.edu.my/19027/ http://irep.iium.edu.my/19027/1/Chapter_6.pdf

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