Design and modeling of silicon MEMS accelerometer
In developing Micro Electro Mechanical Systems (MEMS), Finite Element Analysis (FEA) is usually relied upon to study these micro-structures in determining stress, deformation, resonance, temperature distribution, electromagnetic interference, and electrical properties. With this kind of approach, th...
| Main Authors: | , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2011
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/2052/ http://irep.iium.edu.my/2052/1/ICMAAE-11-188.pdf |