Novel MEMS biosensor with integrated impedance and mass-sensing capabilities
| Main Authors: | , , , |
|---|---|
| Format: | Patent |
| Language: | English |
| Published: |
2011
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/25219/ http://irep.iium.edu.my/25219/ http://irep.iium.edu.my/25219/ http://irep.iium.edu.my/25219/1/US7964144.pdf |