Hysteresis compensation for piezoelectric tube scanner in atomic force microscopy
In this paper, a radial basis function neural network (RBFNN) is designed and used for such purpose. The network is used in conjunction with a self-tuning PID controller. The differential equation of Jenkine element is adopted for hysteresis modeling. The simulation results show that the proposed co...
| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2012
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/25831/ http://irep.iium.edu.my/25831/ http://irep.iium.edu.my/25831/1/Hysteresis_Compensation_for_Piezoelectric_Tube_Scanner_in_Atomic_Force.pdf |