Frequency based hysteresis compensation for piezoelectric tube scanner using artificial neural networks
Piezoelectric positioners are widely used as a nano technology tools. A common application of piezoelectric positioners is the piezoelectric tube scanner. This is because they guarantee a precise nanoscale positioning. However, there are some losses of positioning precession due to vibration in fast...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2012
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/25836/ http://irep.iium.edu.my/25836/ http://irep.iium.edu.my/25836/ http://irep.iium.edu.my/25836/1/Frequency_Based_Hysteresis_Compensation_for_Piezoelectric_Tube_Scanner_using_Artificial_Neural_Networks.pdf |