Investigation of the effects of machining parameters and air blowing on surface topography in high speed end milling of silicon
Machining of silicon is an expensive affair because its inherent brittleness leads to subsurface crack generation. Research endeavours have therefore focused on ductile mode machining of silicon to obtain crack free machined surfaces with roughness as low as 0.22 μm or even below, hence eliminati...
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Trans Tech Publications, Switzerland
2012
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| Online Access: | http://irep.iium.edu.my/26306/ http://irep.iium.edu.my/26306/ http://irep.iium.edu.my/26306/1/AMR.576.11.pdf |
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iium-263062013-07-18T07:21:15Z http://irep.iium.edu.my/26306/ Investigation of the effects of machining parameters and air blowing on surface topography in high speed end milling of silicon Amin, A. K. M. Nurul Khalid, Noor Syairah Mohd Nasir, Siti Nurshahida Arif, Muammer Din TS200 Metal manufactures. Metalworking Machining of silicon is an expensive affair because its inherent brittleness leads to subsurface crack generation. Research endeavours have therefore focused on ductile mode machining of silicon to obtain crack free machined surfaces with roughness as low as 0.22 μm or even below, hence eliminating the need for subsequent polishing/grinding operations. However, most of these research works utilized expensive ultraprecision machines and tools. This research aimed at determining the viability of using conventional milling machines with diamond coated tools, high speed attachments, and air blowing mechanisms in order to achieve ductile regime machining of silicon. Spindle speed, depth of cut, and feed rate, ranges: 60,000 to 80,000 rpm, 10 to 20 μm, and 5 to 15 mm/min respectively, were considered as the independent machining parameters. Compressed air at 0.35 MPa was also provided to prevent chip deposition on the finished surfaces. The resultant surfaces were analysed using Optical and Scanning Electron Microscopes. Then, the influence of each machining parameter on surface roughness was investigated. From the analyses it was concluded that all three machining parameters and air blowing had significant influence on the surface topography and integrity of silicon. Trans Tech Publications, Switzerland 2012-10-08 Article PeerReviewed application/pdf en http://irep.iium.edu.my/26306/1/AMR.576.11.pdf Amin, A. K. M. Nurul and Khalid, Noor Syairah and Mohd Nasir, Siti Nurshahida and Arif, Muammer Din (2012) Investigation of the effects of machining parameters and air blowing on surface topography in high speed end milling of silicon. Advanced Materials Research, 576. pp. 11-14. ISSN 1022-6680 http://www.scientific.net |
| repository_type |
Digital Repository |
| institution_category |
Local University |
| institution |
International Islamic University Malaysia |
| building |
IIUM Repository |
| collection |
Online Access |
| language |
English |
| topic |
TS200 Metal manufactures. Metalworking |
| spellingShingle |
TS200 Metal manufactures. Metalworking Amin, A. K. M. Nurul Khalid, Noor Syairah Mohd Nasir, Siti Nurshahida Arif, Muammer Din Investigation of the effects of machining parameters and air blowing on surface topography in high speed end milling of silicon |
| description |
Machining of silicon is an expensive affair because its inherent brittleness leads to
subsurface crack generation. Research endeavours have therefore focused on ductile mode
machining of silicon to obtain crack free machined surfaces with roughness as low as 0.22 μm or
even below, hence eliminating the need for subsequent polishing/grinding operations. However,
most of these research works utilized expensive ultraprecision machines and tools. This research
aimed at determining the viability of using conventional milling machines with diamond coated
tools, high speed attachments, and air blowing mechanisms in order to achieve ductile regime
machining of silicon. Spindle speed, depth of cut, and feed rate, ranges: 60,000 to 80,000 rpm, 10 to
20 μm, and 5 to 15 mm/min respectively, were considered as the independent machining
parameters. Compressed air at 0.35 MPa was also provided to prevent chip deposition on the finished surfaces. The resultant surfaces were analysed using Optical and Scanning Electron Microscopes. Then, the influence of each machining parameter on surface roughness was investigated. From the analyses it was concluded that all three machining parameters and air blowing had significant influence on the surface topography and integrity of silicon. |
| format |
Article |
| author |
Amin, A. K. M. Nurul Khalid, Noor Syairah Mohd Nasir, Siti Nurshahida Arif, Muammer Din |
| author_facet |
Amin, A. K. M. Nurul Khalid, Noor Syairah Mohd Nasir, Siti Nurshahida Arif, Muammer Din |
| author_sort |
Amin, A. K. M. Nurul |
| title |
Investigation of the effects of machining parameters and air blowing on surface topography in high speed end milling of silicon |
| title_short |
Investigation of the effects of machining parameters and air blowing on surface topography in high speed end milling of silicon |
| title_full |
Investigation of the effects of machining parameters and air blowing on surface topography in high speed end milling of silicon |
| title_fullStr |
Investigation of the effects of machining parameters and air blowing on surface topography in high speed end milling of silicon |
| title_full_unstemmed |
Investigation of the effects of machining parameters and air blowing on surface topography in high speed end milling of silicon |
| title_sort |
investigation of the effects of machining parameters and air blowing on surface topography in high speed end milling of silicon |
| publisher |
Trans Tech Publications, Switzerland |
| publishDate |
2012 |
| url |
http://irep.iium.edu.my/26306/ http://irep.iium.edu.my/26306/ http://irep.iium.edu.my/26306/1/AMR.576.11.pdf |
| first_indexed |
2023-09-18T20:39:12Z |
| last_indexed |
2023-09-18T20:39:12Z |
| _version_ |
1777409251609673728 |