Investigation of the effects of machining parameters and air blowing on surface topography in high speed end milling of silicon
Machining of silicon is an expensive affair because its inherent brittleness leads to subsurface crack generation. Research endeavours have therefore focused on ductile mode machining of silicon to obtain crack free machined surfaces with roughness as low as 0.22 μm or even below, hence eliminati...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Trans Tech Publications, Switzerland
2012
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/26306/ http://irep.iium.edu.my/26306/ http://irep.iium.edu.my/26306/1/AMR.576.11.pdf |