Optimization of zinc oxide thin films for silicon surface acoustic wave resonator applications
High quality ZnO thin films are required to produce CMOS SAW resonators operating with low losses and high Q. This work intends to develop high performance CMOS SAW resonators through optimization of both the quality of the ZnO and the design of the SAW resonator. Zinc oxide was chosen for this w...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Trans Tech Publications, Switzerland
2012
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/26716/ http://irep.iium.edu.my/26716/ http://irep.iium.edu.my/26716/1/Dr_Anis.pdf |