Optimization of zinc oxide thin films for silicon surface acoustic wave resonator applications

Optimization of zinc oxide thin films for silicon surface acoustic wave resonator applications

High quality ZnO thin films are required to produce CMOS SAW resonators operating with low losses and high Q. This work intends to develop high performance CMOS SAW resonators through optimization of both the quality of the ZnO and the design of the SAW resonator. Zinc oxide was chosen for this w...

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Main Authors: Sidek, Fatini, Nordin, Anis Nurashikin, Othman, Raihan
Format: Article
Language:English
Published: Trans Tech Publications, Switzerland 2012
Subjects:
TK7885 Computer engineering
Online Access:http://irep.iium.edu.my/26716/
http://irep.iium.edu.my/26716/
http://irep.iium.edu.my/26716/1/Dr_Anis.pdf
id iium-26716
recordtype eprints
spelling iium-267162013-07-23T06:38:47Z http://irep.iium.edu.my/26716/ Optimization of zinc oxide thin films for silicon surface acoustic wave resonator applications Sidek, Fatini Nordin, Anis Nurashikin Othman, Raihan TK7885 Computer engineering High quality ZnO thin films are required to produce CMOS SAW resonators operating with low losses and high Q. This work intends to develop high performance CMOS SAW resonators through optimization of both the quality of the ZnO and the design of the SAW resonator. Zinc oxide was chosen for this work as the piezoelectric material due to its superior acoustic propagation properties and compatibility with integrated circuit fabrication techniques. ZnO has demonstrated good performance characteristics for a variety of piezoelectric devices. For optimization of the quality of the deposited ZnO thin film, different RF-sputtering conditions will be used to investigate which condition produces the best piezoelectric quality of the ZnO thin film. The experiments were carried using Taguchi optimization method, which studies a large number of variables with a small number of experiments. Trans Tech Publications, Switzerland 2012 Article PeerReviewed application/pdf en http://irep.iium.edu.my/26716/1/Dr_Anis.pdf Sidek, Fatini and Nordin, Anis Nurashikin and Othman, Raihan (2012) Optimization of zinc oxide thin films for silicon surface acoustic wave resonator applications. Advanced Materials Research, 518-23. pp. 3772-3779. ISSN 1022-6680 http://www.scientific.net/AMR.518-523.3772
repository_type Digital Repository
institution_category Local University
institution International Islamic University Malaysia
building IIUM Repository
collection Online Access
language English
topic TK7885 Computer engineering
spellingShingle TK7885 Computer engineering
Sidek, Fatini
Nordin, Anis Nurashikin
Othman, Raihan
Optimization of zinc oxide thin films for silicon surface acoustic wave resonator applications
description High quality ZnO thin films are required to produce CMOS SAW resonators operating with low losses and high Q. This work intends to develop high performance CMOS SAW resonators through optimization of both the quality of the ZnO and the design of the SAW resonator. Zinc oxide was chosen for this work as the piezoelectric material due to its superior acoustic propagation properties and compatibility with integrated circuit fabrication techniques. ZnO has demonstrated good performance characteristics for a variety of piezoelectric devices. For optimization of the quality of the deposited ZnO thin film, different RF-sputtering conditions will be used to investigate which condition produces the best piezoelectric quality of the ZnO thin film. The experiments were carried using Taguchi optimization method, which studies a large number of variables with a small number of experiments.
format Article
author Sidek, Fatini
Nordin, Anis Nurashikin
Othman, Raihan
author_facet Sidek, Fatini
Nordin, Anis Nurashikin
Othman, Raihan
author_sort Sidek, Fatini
title Optimization of zinc oxide thin films for silicon surface acoustic wave resonator applications
title_short Optimization of zinc oxide thin films for silicon surface acoustic wave resonator applications
title_full Optimization of zinc oxide thin films for silicon surface acoustic wave resonator applications
title_fullStr Optimization of zinc oxide thin films for silicon surface acoustic wave resonator applications
title_full_unstemmed Optimization of zinc oxide thin films for silicon surface acoustic wave resonator applications
title_sort optimization of zinc oxide thin films for silicon surface acoustic wave resonator applications
publisher Trans Tech Publications, Switzerland
publishDate 2012
url http://irep.iium.edu.my/26716/
http://irep.iium.edu.my/26716/
http://irep.iium.edu.my/26716/1/Dr_Anis.pdf
first_indexed 2023-09-18T20:39:46Z
last_indexed 2023-09-18T20:39:46Z
_version_ 1777409286293422080

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