Acoustic wave based MEMS devices for biosensing applications

This paper presents a review of acoustic-wave based MEMS devices that offer a promising technology platform for the development of sensitive, portable, real-time biosensors. MEMS fabrication of acoustic wave based biosensors enables device miniaturization, power consumption reduction and integrati...

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Bibliographic Details
Main Authors: Voiculescu, Ioana, Nordin, Anis Nurashikin
Format: Article
Language:English
Published: Elsevier 2012
Subjects:
Online Access:http://irep.iium.edu.my/26717/
http://irep.iium.edu.my/26717/
http://irep.iium.edu.my/26717/1/saw-ioana.pdf