Acoustic wave based MEMS devices for biosensing applications
This paper presents a review of acoustic-wave based MEMS devices that offer a promising technology platform for the development of sensitive, portable, real-time biosensors. MEMS fabrication of acoustic wave based biosensors enables device miniaturization, power consumption reduction and integrati...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2012
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/26717/ http://irep.iium.edu.my/26717/ http://irep.iium.edu.my/26717/1/saw-ioana.pdf |
| Summary: | This paper presents a review of acoustic-wave based MEMS devices that offer a promising technology
platform for the development of sensitive, portable, real-time biosensors. MEMS fabrication of acoustic
wave based biosensors enables device miniaturization, power consumption reduction and integration
with electronic circuits. For biological applications, the biosensors are integrated in a microfluidic system
and the sensing area is coated with a biospecific layer. When a bioanalyte interacts with the sensing layer,
mass and viscosity variations of the biospecific layer can be detected by monitoring changes in the acoustic
wave properties such as velocity, attenuation, resonant frequency and delay time. Few types of acoustic
wave devices could be integrated in microfluidic systems without significant degradation of the quality
factor. The acoustic wave based MEMS devices reported in the literature as biosensors and presented in
this review are film bulk acoustic wave resonators (FBAR), surface acoustic waves (SAW) resonators and
SAW delay lines. Different approaches to the realization of FBARs, SAW resonators and SAW delay lines
for various biochemical applications are presented. Methods of integration of the acoustic wave MEMS
devices in the microfluidic systems and functionalization strategies will be also discussed. |
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