APA (7th ed.) Citation

Za'bah, N. F., Kwa, K. S. K., & O'Neill, A. (2013). Optimization of the process modules for a top-down silicon nanowire fabrication using optical lithography and orientation dependent etching. Trans Tech Publications, Switzerland.

Chicago Style (17th ed.) Citation

Za'bah, Nor Farahidah, Kelvin S. K. Kwa, and Anthony O'Neill. Optimization of the Process Modules for a Top-down Silicon nanowire Fabrication Using Optical Lithography And orientation Dependent Etching. Trans Tech Publications, Switzerland, 2013.

MLA (8th ed.) Citation

Za'bah, Nor Farahidah, et al. Optimization of the Process Modules for a Top-down Silicon nanowire Fabrication Using Optical Lithography And orientation Dependent Etching. Trans Tech Publications, Switzerland, 2013.