APA (7th ed.) Citation

Muhida, R., Rahman, M. M., Chowdhury, M. S. H., Muhida, R., Zainuddin, H., Zakaria, A., & Kasai, H. (2012). Theoretical study of atomic level understanding of the reactive ion etching (RIE). American Scientific Publishers.

Chicago Style (17th ed.) Citation

Muhida, Rifki, Md. Mamudur Rahman, Md. Sazzad Hossien Chowdhury, Riza Muhida, Hishamuddin Zainuddin, Azmi Zakaria, and Hideaki Kasai. Theoretical Study of Atomic Level Understanding of the Reactive Ion Etching (RIE). American Scientific Publishers, 2012.

MLA (8th ed.) Citation

Muhida, Rifki, et al. Theoretical Study of Atomic Level Understanding of the Reactive Ion Etching (RIE). American Scientific Publishers, 2012.