Application of focused ion beam for machining of nanopillar sheet
This report introduced focused ion beam (FIB) micromachining as a potential technique to fabricate Bio-MEMS microfluidic devices. This work investigated the influence of three FIB process parameters, which were acceleration voltage, dwell time and milled depth. The response variables were taper angl...
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| Format: | Monograph |
| Language: | English |
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2011
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| Online Access: | http://irep.iium.edu.my/28921/ http://irep.iium.edu.my/28921/ http://irep.iium.edu.my/28921/1/095_EDW_B0803-99_2011_Full_Version_of_Research_Report.pdf |