Application of focused ion beam for machining of nanopillar sheet

This report introduced focused ion beam (FIB) micromachining as a potential technique to fabricate Bio-MEMS microfluidic devices. This work investigated the influence of three FIB process parameters, which were acceleration voltage, dwell time and milled depth. The response variables were taper angl...

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Bibliographic Details
Main Author:	Ali, Mohammad Yeakub
Format:	Monograph
Language:	English
Published:	s.n 2011
Subjects:	TJ Mechanical engineering and machinery TS Manufactures
Online Access:	http://irep.iium.edu.my/28921/ http://irep.iium.edu.my/28921/ http://irep.iium.edu.my/28921/1/095_EDW_B0803-99_2011_Full_Version_of_Research_Report.pdf

id	iium-28921
recordtype	eprints
spelling	iium-289212014-01-21T02:31:22Z http://irep.iium.edu.my/28921/ Application of focused ion beam for machining of nanopillar sheet Ali, Mohammad Yeakub TJ Mechanical engineering and machinery TS Manufactures This report introduced focused ion beam (FIB) micromachining as a potential technique to fabricate Bio-MEMS microfluidic devices. This work investigated the influence of three FIB process parameters, which were acceleration voltage, dwell time and milled depth. The response variables were taper angle (θ), aspect ratio (ar) and average surface roughness (Ra). Statistical models of output responses were developed using Taguchi method of design of experiment. Signal to noise ratio were calculated and analyzed for all of the responses. Developed models were used for multiple response optimizations by desirability function approach to obtain minimum θ, Ra and maximum ar. The optimized values were obtained and verified experimentally. The optimized values of θ, ar were 7.5° and 1.7 respectively which were obtained at acceleration voltage of 20 keV, dwell time of 15 μs and milled depth of 5 μm. Besides, the optimized values of Ra were 13.7 nm was obtained at acceleration voltage of 20 keV, dwell time of 15 μs and milled depth of 0.6μm. By using these process parameters, microfeatures for Bio-MEMS were fabricated s.n 2011-01 Monograph NonPeerReviewed application/pdf en http://irep.iium.edu.my/28921/1/095_EDW_B0803-99_2011_Full_Version_of_Research_Report.pdf Ali, Mohammad Yeakub (2011) Application of focused ion beam for machining of nanopillar sheet. Research Report. s.n. (Unpublished) EDW B 0803 - 99
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English
topic	TJ Mechanical engineering and machinery TS Manufactures
spellingShingle	TJ Mechanical engineering and machinery TS Manufactures Ali, Mohammad Yeakub Application of focused ion beam for machining of nanopillar sheet
description	This report introduced focused ion beam (FIB) micromachining as a potential technique to fabricate Bio-MEMS microfluidic devices. This work investigated the influence of three FIB process parameters, which were acceleration voltage, dwell time and milled depth. The response variables were taper angle (θ), aspect ratio (ar) and average surface roughness (Ra). Statistical models of output responses were developed using Taguchi method of design of experiment. Signal to noise ratio were calculated and analyzed for all of the responses. Developed models were used for multiple response optimizations by desirability function approach to obtain minimum θ, Ra and maximum ar. The optimized values were obtained and verified experimentally. The optimized values of θ, ar were 7.5° and 1.7 respectively which were obtained at acceleration voltage of 20 keV, dwell time of 15 μs and milled depth of 5 μm. Besides, the optimized values of Ra were 13.7 nm was obtained at acceleration voltage of 20 keV, dwell time of 15 μs and milled depth of 0.6μm. By using these process parameters, microfeatures for Bio-MEMS were fabricated
format	Monograph
author	Ali, Mohammad Yeakub
author_facet	Ali, Mohammad Yeakub
author_sort	Ali, Mohammad Yeakub
title	Application of focused ion beam for machining of nanopillar sheet
title_short	Application of focused ion beam for machining of nanopillar sheet
title_full	Application of focused ion beam for machining of nanopillar sheet
title_fullStr	Application of focused ion beam for machining of nanopillar sheet
title_full_unstemmed	Application of focused ion beam for machining of nanopillar sheet
title_sort	application of focused ion beam for machining of nanopillar sheet
publisher	s.n
publishDate	2011
url	http://irep.iium.edu.my/28921/ http://irep.iium.edu.my/28921/ http://irep.iium.edu.my/28921/1/095_EDW_B0803-99_2011_Full_Version_of_Research_Report.pdf
first_indexed	2023-09-18T20:42:29Z
last_indexed	2023-09-18T20:42:29Z
_version_	1777409457512251392

Application of focused ion beam for machining of nanopillar sheet

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