Design optimization of MEMS dual-leg shaped piezoresistive microcantilever
In this paper, an optimization on the mechanical behaviour of silicon piezoresistive microcantilever (PRM) has been carried out. Using CoventorWare 2008, the mechanical behavior of the PRM structure was investigated by studying few contributing factors that affect the performance of the device. The...
| Main Authors: | , , , |
|---|---|
| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2013
|
| Subjects: | |
| Online Access: | http://irep.iium.edu.my/34881/ http://irep.iium.edu.my/34881/ http://irep.iium.edu.my/34881/1/IEEE_Published_RSM_2013.pdf |