Simulation of a MEMS piezoelectric energy harvester

The growing demand of portable electronic devices has created the demand of long lasting recharged source of power. Non-environmental friendly conventional batteries with limited lifetimes are no longer a feasible option. This paper proposes a piezoelectric, vibration based energy harvester. The des...

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Main Authors:	Md Ralib @ Md Raghib, Aliza 'Aini, Nordin, Anis Nurashikin, Salleh, Hanim
Format:	Conference or Workshop Item
Language:	English
Published:	2010
Subjects:	TK7885 Computer engineering
Online Access:	http://irep.iium.edu.my/3707/ http://irep.iium.edu.my/3707/ http://irep.iium.edu.my/3707/1/3707.pdf

id	iium-3707
recordtype	eprints
spelling	iium-37072016-03-17T02:49:14Z http://irep.iium.edu.my/3707/ Simulation of a MEMS piezoelectric energy harvester Md Ralib @ Md Raghib, Aliza 'Aini Nordin, Anis Nurashikin Salleh, Hanim TK7885 Computer engineering The growing demand of portable electronic devices has created the demand of long lasting recharged source of power. Non-environmental friendly conventional batteries with limited lifetimes are no longer a feasible option. This paper proposes a piezoelectric, vibration based energy harvester. The design and simulation of a MEMS piezoelectric cantilever beam with interdigitated electrodes is described. The micro-energy harvester is formed using a silicon substrate, ZnO piezoelectric layer, Pt electrodes and nickel proof mass. Finite element simulation was conducted using CoventorWare #x00A9; to obtain the device at resonance frequency, output voltage and optimum dimensions. 2010-05 Conference or Workshop Item PeerReviewed application/pdf en http://irep.iium.edu.my/3707/1/3707.pdf Md Ralib @ Md Raghib, Aliza 'Aini and Nordin, Anis Nurashikin and Salleh, Hanim (2010) Simulation of a MEMS piezoelectric energy harvester. In: 2010 Symposium on Design Test Integration and Packaging of MEMS/MOEMS (DTIP 2010), 5-7 May 2010, Seville, Spain. http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=5486470&tag=1
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English
topic	TK7885 Computer engineering
spellingShingle	TK7885 Computer engineering Md Ralib @ Md Raghib, Aliza 'Aini Nordin, Anis Nurashikin Salleh, Hanim Simulation of a MEMS piezoelectric energy harvester
description	The growing demand of portable electronic devices has created the demand of long lasting recharged source of power. Non-environmental friendly conventional batteries with limited lifetimes are no longer a feasible option. This paper proposes a piezoelectric, vibration based energy harvester. The design and simulation of a MEMS piezoelectric cantilever beam with interdigitated electrodes is described. The micro-energy harvester is formed using a silicon substrate, ZnO piezoelectric layer, Pt electrodes and nickel proof mass. Finite element simulation was conducted using CoventorWare #x00A9; to obtain the device at resonance frequency, output voltage and optimum dimensions.
format	Conference or Workshop Item
author	Md Ralib @ Md Raghib, Aliza 'Aini Nordin, Anis Nurashikin Salleh, Hanim
author_facet	Md Ralib @ Md Raghib, Aliza 'Aini Nordin, Anis Nurashikin Salleh, Hanim
author_sort	Md Ralib @ Md Raghib, Aliza 'Aini
title	Simulation of a MEMS piezoelectric energy harvester
title_short	Simulation of a MEMS piezoelectric energy harvester
title_full	Simulation of a MEMS piezoelectric energy harvester
title_fullStr	Simulation of a MEMS piezoelectric energy harvester
title_full_unstemmed	Simulation of a MEMS piezoelectric energy harvester
title_sort	simulation of a mems piezoelectric energy harvester
publishDate	2010
url	http://irep.iium.edu.my/3707/ http://irep.iium.edu.my/3707/ http://irep.iium.edu.my/3707/1/3707.pdf
first_indexed	2023-09-18T20:11:38Z
last_indexed	2023-09-18T20:11:38Z
_version_	1777407517045817344

Simulation of a MEMS piezoelectric energy harvester

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