Piezoelectric thin films for double electrode CMOS MEMS surface acoustic wave (SAW) resonator
CMOS integration for RF-MEMS is desired to yield compact, low-power and portable devices. In this work, we illustrate the usage of double electrode CMOS SAW resonators using both ZnO and AlN as its piezoelectric material. Double electrode transducers were chosen, as they are better at suppressi...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Springer Berlin / Heidelberg
2015
|
| Subjects: | |
| Online Access: | http://irep.iium.edu.my/39246/ http://irep.iium.edu.my/39246/ http://irep.iium.edu.my/39246/ http://irep.iium.edu.my/39246/7/39246_Piezoelectric_thin_films_for_double_electrode.pdf |