Development of copper based miniature electrostatic actuator using WEDM with low actuation voltage
Fabricating electrostatic micro actuator, such as comb-drive actuator, is one of the demanding areas of the MEMS technology because of the promising applications in modern engineering, such as, micro-switches, attenuators, filters, micro-lenses, optical waveguide couplers, modulation, interfero...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Springer
2014
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/39442/ http://irep.iium.edu.my/39442/ http://irep.iium.edu.my/39442/ http://irep.iium.edu.my/39442/1/Electrostatic_Actuator.pdf |