Development of copper based miniature electrostatic actuator using WEDM with low actuation voltage
Fabricating electrostatic micro actuator, such as comb-drive actuator, is one of the demanding areas of the MEMS technology because of the promising applications in modern engineering, such as, micro-switches, attenuators, filters, micro-lenses, optical waveguide couplers, modulation, interfero...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Springer
2014
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/39442/ http://irep.iium.edu.my/39442/ http://irep.iium.edu.my/39442/ http://irep.iium.edu.my/39442/1/Electrostatic_Actuator.pdf |
| Summary: | Fabricating electrostatic micro actuator, such
as comb-drive actuator, is one of the demanding areas of
the MEMS technology because of the promising applications
in modern engineering, such as, micro-switches,
attenuators, filters, micro-lenses, optical waveguide couplers,
modulation, interferometer, dynamic focus mirror,
and chopper. For the fabrication, most of the cases silicon
monocrystalline wafers are used through complex process.
To etch the silicon substrates, researchers often use deep
reactive-ion etching or anisotropic wet etching procedure
which are time consuming and unsuitable for batch fabrication
process. Again, resent research shows that comb-drive
actuators need comparatively high voltage for actuation. In
solving these problems, the study presents a copper based
electrostatic micro actuator with low actuation voltage.
Using wire electrical discharge machine (WEDM), the
actuator is fabricated where a light weight flexible spring
model is introduced. Capacitor design model is applied
to present a voltage controlling electronic circuit using
Arduino micro controller unit. The experimental result
shows that the actuator is able to produce 1.38 mN force
for 15 V DC. The experiment also proves that coper based
actuator design using WEDM technology is much easier
for batch processing and could provide the advantages in
rapid prototyping. |
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