Design and optimization of alLow-voltage shunt capacitive RF-MEMS switch
This paper presents the design, optimization and simulation of a radio frequency (RF) micro-electromechanical system (MEMS) switch. The device is a capacitive shunt- connection switch, which uses four folded beams to support a big membrane above the signal transmission line. Another four straight be...
| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2014
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/46632/ http://irep.iium.edu.my/46632/ http://irep.iium.edu.my/46632/1/C_-_2014_-_Design_and_Optimization_of_a_Low-Votlage_Shunt_Capacitive_RF-MEMS_Switch.pdf |