Equivalent circuit modeling of two-port Al-doped Zinc Oxide CMOS SAW resonator using MATLABâ„¢
The accelerated growth of wireless communication system has increased the interest of research in CMOS integration in RF MEMS. A complete integrated silicon based resonator potentially eliminates lossy interfacing to on chip electronics. This paper presents the equivalent circuit modeling of a CMOS...
| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2013
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/46636/ http://irep.iium.edu.my/46636/ http://irep.iium.edu.my/46636/1/46636.pdf |