Design and simulation of 20MHz oscillator using CMOS-MEMS beam resonators
We present the design and analysis result of a low power, low noise, 20 MHz CMOS-MEMS oscillators. To perform oscillator circuit simulations, the CMOS-MEMS resonator (Clamped-Clamped beam) was modeled using its RLC equivalent circuits. For a MEMS resonator to be able to function as an oscillator it...
| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
IEEE
2013
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/49602/ http://irep.iium.edu.my/49602/ http://irep.iium.edu.my/49602/ http://irep.iium.edu.my/49602/1/49602.pdf |