Design and simulation of 20MHz oscillator using CMOS-MEMS beam resonators

We present the design and analysis result of a low power, low noise, 20 MHz CMOS-MEMS oscillators. To perform oscillator circuit simulations, the CMOS-MEMS resonator (Clamped-Clamped beam) was modeled using its RLC equivalent circuits. For a MEMS resonator to be able to function as an oscillator it...

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Main Authors:	Zainuddin, Ahmad Anwar, Nordin, Anis Nurashikin, Pandian, Monharaj Soundara, Khan, Sheroz
Format:	Conference or Workshop Item
Language:	English
Published:	IEEE 2013
Subjects:	TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Online Access:	http://irep.iium.edu.my/49602/ http://irep.iium.edu.my/49602/ http://irep.iium.edu.my/49602/ http://irep.iium.edu.my/49602/1/49602.pdf

id	iium-49602
recordtype	eprints
spelling	iium-496022016-05-17T01:28:55Z http://irep.iium.edu.my/49602/ Design and simulation of 20MHz oscillator using CMOS-MEMS beam resonators Zainuddin, Ahmad Anwar Nordin, Anis Nurashikin Pandian, Monharaj Soundara Khan, Sheroz TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices We present the design and analysis result of a low power, low noise, 20 MHz CMOS-MEMS oscillators. To perform oscillator circuit simulations, the CMOS-MEMS resonator (Clamped-Clamped beam) was modeled using its RLC equivalent circuits. For a MEMS resonator to be able to function as an oscillator it needs to be coupled with supporting amplifier circuits. The MEMS beam resonator has 73dB insertion loss which translates to motional resistance of Rx=3MΩ, capacitance, Cx=4.58aF and inductance, Lx=14.5H respectively. The amplifier design is based on the requirement for oscillation, which is, the loop gain of one and the zero phase shifts. For this work, the pierce circuit topology was chosen due to its simplicity and high frequency stability. Both the amplifier and beam resonators were designed using Silterra's CMOS technology. The design of the amplifier comprises of 6 transistors, which are integrated with the MEMS beam resonator to form an oscillator. The proposed CMOS-MEMS oscillators is capable of generating 20 MHz clocks. The beam resonators require approximately 40VDC and 400mV, VAC to vibrate. The actuation was simulated and measured using Finite modeling software, FEM and Cadence to obtain the desired design parameters. The design of 20MHz oscillator produces output power -1.45dBm by using 1.8V power supply. IEEE 2013 Conference or Workshop Item PeerReviewed application/pdf en http://irep.iium.edu.my/49602/1/49602.pdf Zainuddin, Ahmad Anwar and Nordin, Anis Nurashikin and Pandian, Monharaj Soundara and Khan, Sheroz (2013) Design and simulation of 20MHz oscillator using CMOS-MEMS beam resonators. In: 2013 IEEE Regional Symposium on Micro and Nanoelectronics (RSM), 25th-27th Sept. 2013, Langkawi. http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6706469&tag=1 10.1109/RSM.2013.6706469
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English
topic	TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
spellingShingle	TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices Zainuddin, Ahmad Anwar Nordin, Anis Nurashikin Pandian, Monharaj Soundara Khan, Sheroz Design and simulation of 20MHz oscillator using CMOS-MEMS beam resonators
description	We present the design and analysis result of a low power, low noise, 20 MHz CMOS-MEMS oscillators. To perform oscillator circuit simulations, the CMOS-MEMS resonator (Clamped-Clamped beam) was modeled using its RLC equivalent circuits. For a MEMS resonator to be able to function as an oscillator it needs to be coupled with supporting amplifier circuits. The MEMS beam resonator has 73dB insertion loss which translates to motional resistance of Rx=3MΩ, capacitance, Cx=4.58aF and inductance, Lx=14.5H respectively. The amplifier design is based on the requirement for oscillation, which is, the loop gain of one and the zero phase shifts. For this work, the pierce circuit topology was chosen due to its simplicity and high frequency stability. Both the amplifier and beam resonators were designed using Silterra's CMOS technology. The design of the amplifier comprises of 6 transistors, which are integrated with the MEMS beam resonator to form an oscillator. The proposed CMOS-MEMS oscillators is capable of generating 20 MHz clocks. The beam resonators require approximately 40VDC and 400mV, VAC to vibrate. The actuation was simulated and measured using Finite modeling software, FEM and Cadence to obtain the desired design parameters. The design of 20MHz oscillator produces output power -1.45dBm by using 1.8V power supply.
format	Conference or Workshop Item
author	Zainuddin, Ahmad Anwar Nordin, Anis Nurashikin Pandian, Monharaj Soundara Khan, Sheroz
author_facet	Zainuddin, Ahmad Anwar Nordin, Anis Nurashikin Pandian, Monharaj Soundara Khan, Sheroz
author_sort	Zainuddin, Ahmad Anwar
title	Design and simulation of 20MHz oscillator using CMOS-MEMS beam resonators
title_short	Design and simulation of 20MHz oscillator using CMOS-MEMS beam resonators
title_full	Design and simulation of 20MHz oscillator using CMOS-MEMS beam resonators
title_fullStr	Design and simulation of 20MHz oscillator using CMOS-MEMS beam resonators
title_full_unstemmed	Design and simulation of 20MHz oscillator using CMOS-MEMS beam resonators
title_sort	design and simulation of 20mhz oscillator using cmos-mems beam resonators
publisher	IEEE
publishDate	2013
url	http://irep.iium.edu.my/49602/ http://irep.iium.edu.my/49602/ http://irep.iium.edu.my/49602/ http://irep.iium.edu.my/49602/1/49602.pdf
first_indexed	2023-09-18T21:10:06Z
last_indexed	2023-09-18T21:10:06Z
_version_	1777411195552137216

Design and simulation of 20MHz oscillator using CMOS-MEMS beam resonators

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