Fabrication of dual- and single-layer piezoresistive microcantilever sensor
In this paper, the fabrication of piezoresistive microcantilever (PRM) sensor was realized through the utilization of bulk micromachining technology. Through a sequence of photolithography and etching processes, the device fabrication is realized. The fabrication of two PRM designs, dual-layer and s...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English English |
| Published: |
Asian Research Publishing Network (ARPN)
2015
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/50730/ http://irep.iium.edu.my/50730/ http://irep.iium.edu.my/50730/1/50730_Fabrication_of_dual-and_single-layer_piezoresistive_microcantilever_sensor.pdf http://irep.iium.edu.my/50730/2/50730_Fabrication_of_dual-and_single-layer_piezoresistive_microcantilever_sensor_SCOPUS.pdf |
Internet
http://irep.iium.edu.my/50730/http://irep.iium.edu.my/50730/
http://irep.iium.edu.my/50730/1/50730_Fabrication_of_dual-and_single-layer_piezoresistive_microcantilever_sensor.pdf
http://irep.iium.edu.my/50730/2/50730_Fabrication_of_dual-and_single-layer_piezoresistive_microcantilever_sensor_SCOPUS.pdf