Parametric study of sputtering microchannels via focused ion beam (FIB)
Focused ion beams (FIB) are used in microfabrication and have certain advantages compared to photolithography and other micromachining technologies. The main advantage is that it can be used for direct writing/patterning of the target material. FIB can create a variety of geometric features, has the...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English English |
| Published: |
Asian Research Publishing Network (ARPN)
2015
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/50752/ http://irep.iium.edu.my/50752/ http://irep.iium.edu.my/50752/1/50752_Parametric_study_of_sputtering_microchannels_via_focused_ion_beam_%28FIB%29.pdf http://irep.iium.edu.my/50752/2/50752_Parametric_study_of_sputtering_microchannels_via_focused_ion_beam_%28FIB%29_SCOPUS.pdf |
Internet
http://irep.iium.edu.my/50752/http://irep.iium.edu.my/50752/
http://irep.iium.edu.my/50752/1/50752_Parametric_study_of_sputtering_microchannels_via_focused_ion_beam_%28FIB%29.pdf
http://irep.iium.edu.my/50752/2/50752_Parametric_study_of_sputtering_microchannels_via_focused_ion_beam_%28FIB%29_SCOPUS.pdf