Finite element simulation of miniaturized ZnO/Si SAW sensor for rapid detection of dichloromethane gas
Air quality control is very crucial as poor air quality can lead to chronic respiratory organ diseases. Hence, detection of numerous toxic and hazardous gas is utmost significance. A low cost and high sensitivity gas sensor is crucial to monitor the excessive presence of the dangerous gas that can h...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English English |
| Published: |
2018
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/73440/ http://irep.iium.edu.my/73440/ http://irep.iium.edu.my/73440/ http://irep.iium.edu.my/73440/1/73440_Finite%20Element%20Simulation%20of%20Miniaturized_complete.pdf http://irep.iium.edu.my/73440/2/73440_Finite%20Element%20Simulation%20of%20Miniaturized_wos.pdf |