Finite element simulation of miniaturized ZnO/Si SAW sensor for rapid detection of dichloromethane gas

Air quality control is very crucial as poor air quality can lead to chronic respiratory organ diseases. Hence, detection of numerous toxic and hazardous gas is utmost significance. A low cost and high sensitivity gas sensor is crucial to monitor the excessive presence of the dangerous gas that can h...

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Main Authors:	Mohamad Razali, Nur Fatin, Md Ralib, Aliza Aini, Saidin, Norazlina
Format:	Article
Language:	English English
Published:	2018
Subjects:	TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Online Access:	http://irep.iium.edu.my/73440/ http://irep.iium.edu.my/73440/ http://irep.iium.edu.my/73440/ http://irep.iium.edu.my/73440/1/73440_Finite%20Element%20Simulation%20of%20Miniaturized_complete.pdf http://irep.iium.edu.my/73440/2/73440_Finite%20Element%20Simulation%20of%20Miniaturized_wos.pdf

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spelling	iium-734402019-08-01T05:40:08Z http://irep.iium.edu.my/73440/ Finite element simulation of miniaturized ZnO/Si SAW sensor for rapid detection of dichloromethane gas Mohamad Razali, Nur Fatin Md Ralib, Aliza Aini Saidin, Norazlina TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices Air quality control is very crucial as poor air quality can lead to chronic respiratory organ diseases. Hence, detection of numerous toxic and hazardous gas is utmost significance. A low cost and high sensitivity gas sensor is crucial to monitor the excessive presence of the dangerous gas that can harm human’s health. In recent years, various type of gas sensors have been developed for various applications such as medicine, industry, automotive and environmental monitoring. One of the harmful gas is the dichloromethane gas. Dichloromethane (DCM) gas, CH2Cl2 is widely used in industry due to its organic characteristics. However, the excessive of the amount of the gas could bring harm to human’s health. Hence, a lot of sensing devices have been developed including surface acoustic wave (SAW) gas sensor. This paper presents the 2D finite element simulation of miniaturized ZnO/Si SAW gas sensor for rapid detection of DCM gas. Using a powerful finite element analysis software known as COMSOL Multiphysics, the gas sensor is modelled according to the specific criteria using 2D approach. The effect of different thickness of ZnO thin film as piezoelectric layer is investigated on the SAW propagation characteristics. The resonance frequency of simulated ZnO/Si SAW gas sensor is 300 MHz with wavelength of 11.67μm. The shift in frequency is the measurement used to measure the changes occured to sense the presence or absence of DCM gas. The shift of resonance frequency is observed in the absence and presence of dichloromethane gas. This work has high potential to realize single chip gas sensor due to its silicon compatibility for rapid detection of harmful gas for environmental monitoring. 2018-11 Article PeerReviewed application/pdf en http://irep.iium.edu.my/73440/1/73440_Finite%20Element%20Simulation%20of%20Miniaturized_complete.pdf application/pdf en http://irep.iium.edu.my/73440/2/73440_Finite%20Element%20Simulation%20of%20Miniaturized_wos.pdf Mohamad Razali, Nur Fatin and Md Ralib, Aliza Aini and Saidin, Norazlina (2018) Finite element simulation of miniaturized ZnO/Si SAW sensor for rapid detection of dichloromethane gas. Advanced Science Letters, 24 (11). pp. 8966-8969. ISSN 1936-6612 https://www-ingentaconnect-com.ezproxy.um.edu.my/content/asp/asl/2018/00000024/00000011/art00251;jsessionid=3v7ev53h7vreh.x-ic-live-03 10.1166/asl.2018.12385
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English English
topic	TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
spellingShingle	TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices Mohamad Razali, Nur Fatin Md Ralib, Aliza Aini Saidin, Norazlina Finite element simulation of miniaturized ZnO/Si SAW sensor for rapid detection of dichloromethane gas
description	Air quality control is very crucial as poor air quality can lead to chronic respiratory organ diseases. Hence, detection of numerous toxic and hazardous gas is utmost significance. A low cost and high sensitivity gas sensor is crucial to monitor the excessive presence of the dangerous gas that can harm human’s health. In recent years, various type of gas sensors have been developed for various applications such as medicine, industry, automotive and environmental monitoring. One of the harmful gas is the dichloromethane gas. Dichloromethane (DCM) gas, CH2Cl2 is widely used in industry due to its organic characteristics. However, the excessive of the amount of the gas could bring harm to human’s health. Hence, a lot of sensing devices have been developed including surface acoustic wave (SAW) gas sensor. This paper presents the 2D finite element simulation of miniaturized ZnO/Si SAW gas sensor for rapid detection of DCM gas. Using a powerful finite element analysis software known as COMSOL Multiphysics, the gas sensor is modelled according to the specific criteria using 2D approach. The effect of different thickness of ZnO thin film as piezoelectric layer is investigated on the SAW propagation characteristics. The resonance frequency of simulated ZnO/Si SAW gas sensor is 300 MHz with wavelength of 11.67μm. The shift in frequency is the measurement used to measure the changes occured to sense the presence or absence of DCM gas. The shift of resonance frequency is observed in the absence and presence of dichloromethane gas. This work has high potential to realize single chip gas sensor due to its silicon compatibility for rapid detection of harmful gas for environmental monitoring.
format	Article
author	Mohamad Razali, Nur Fatin Md Ralib, Aliza Aini Saidin, Norazlina
author_facet	Mohamad Razali, Nur Fatin Md Ralib, Aliza Aini Saidin, Norazlina
author_sort	Mohamad Razali, Nur Fatin
title	Finite element simulation of miniaturized ZnO/Si SAW sensor for rapid detection of dichloromethane gas
title_short	Finite element simulation of miniaturized ZnO/Si SAW sensor for rapid detection of dichloromethane gas
title_full	Finite element simulation of miniaturized ZnO/Si SAW sensor for rapid detection of dichloromethane gas
title_fullStr	Finite element simulation of miniaturized ZnO/Si SAW sensor for rapid detection of dichloromethane gas
title_full_unstemmed	Finite element simulation of miniaturized ZnO/Si SAW sensor for rapid detection of dichloromethane gas
title_sort	finite element simulation of miniaturized zno/si saw sensor for rapid detection of dichloromethane gas
publishDate	2018
url	http://irep.iium.edu.my/73440/ http://irep.iium.edu.my/73440/ http://irep.iium.edu.my/73440/ http://irep.iium.edu.my/73440/1/73440_Finite%20Element%20Simulation%20of%20Miniaturized_complete.pdf http://irep.iium.edu.my/73440/2/73440_Finite%20Element%20Simulation%20of%20Miniaturized_wos.pdf
first_indexed	2023-09-18T21:44:07Z
last_indexed	2023-09-18T21:44:07Z
_version_	1777413335129522176

Finite element simulation of miniaturized ZnO/Si SAW sensor for rapid detection of dichloromethane gas

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