Fabrication and varification of porous silicon nanostructures/ zinc oxide nanostructures as a capacitive chemical sensors by electrochemical impedance method / Mohd Husairi Fadzilah Suhaimi

In this study, preparation and optimization of ZnO nanostructures on PSiNs for chemical sensor was studied. The PSiNs was prepared by electrochemical etching using p-type, [100] orientation silicon wafer as a based material. The PSiNs samples were prepared by the electrochemical etching with photoas...

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Bibliographic Details
Main Author: Fadzilah Suhaimi, Mohd Husairi
Format: Book Section
Language:English
Published: Institute of Graduate Studies, UiTM 2015
Subjects:
Online Access:http://ir.uitm.edu.my/id/eprint/19503/
http://ir.uitm.edu.my/id/eprint/19503/1/ABS_MOHD%20HUSAIRI%20FADZILAH%20SUHAIMI%20TDRA%20VOL%208%20IGS%2015.pdf