Normah Ahmad, Uda Hashim, Mohd Jeffery Manaf, & Kadir Ibrahim Abdul Wahab. (2007). Characterization of alignment strategy to achieve a reliable alignment accuracy in advanced lithography.
Chicago Style (17th ed.) CitationNormah Ahmad, Uda Hashim, Mohd Jeffery Manaf, and Kadir Ibrahim Abdul Wahab. Characterization of Alignment Strategy to Achieve a Reliable Alignment Accuracy in Advanced Lithography. 2007.
MLA (8th ed.) CitationNormah Ahmad, et al. Characterization of Alignment Strategy to Achieve a Reliable Alignment Accuracy in Advanced Lithography. 2007.
Warning: These citations may not always be 100% accurate.