Optical constants and electronic transition in hydrogenated silicon (Si:H) thin films deposited by layer-by-layer (LBL) deposition technique
Optical constants derived from optical transmission (T) and reflectance (R) spectra in the wavelength range of 220 to 2200 nm are presented in this paper for hydrogenated silicon (Si:H) thin films deposited by plasma enhanced chemical vapor deposition (PECVD) using the layer-by-layer (LBL) depositio...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Universiti Kebangsaan Malaysia
2011
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| Online Access: | http://journalarticle.ukm.my/2448/ http://journalarticle.ukm.my/2448/ http://journalarticle.ukm.my/2448/1/13_Goh.pdf |