Experimental micromachining of silicon with Nd-YAG laser
This research centers on experimental laser-micromachining of silicon using solid state pulsed Nd:YAG laser. The laser is equipped with 3-axis controllers with resolution of 1 μm. The main objective is to find out the possibility of using this laser machining system to fabricate a micro feature on s...
| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2011
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| Subjects: | |
| Online Access: | http://umpir.ump.edu.my/id/eprint/26175/ http://umpir.ump.edu.my/id/eprint/26175/ http://umpir.ump.edu.my/id/eprint/26175/1/Experimental%20Micromachining%20of%20Silicon%20with%20Nd-YAG%20Laser.pdf |