Experimental micromachining of silicon with Nd-YAG laser

This research centers on experimental laser-micromachining of silicon using solid state pulsed Nd:YAG laser. The laser is equipped with 3-axis controllers with resolution of 1 μm. The main objective is to find out the possibility of using this laser machining system to fabricate a micro feature on s...

Full description

Bibliographic Details
Main Authors:	Mon, Thet Thet, Khairul Fikri, Muhammad, Asnul Hadi, Ahmad, Zazuli, Mohid
Format:	Conference or Workshop Item
Language:	English
Published:	2011
Subjects:	TJ Mechanical engineering and machinery
Online Access:	http://umpir.ump.edu.my/id/eprint/26175/ http://umpir.ump.edu.my/id/eprint/26175/ http://umpir.ump.edu.my/id/eprint/26175/1/Experimental%20Micromachining%20of%20Silicon%20with%20Nd-YAG%20Laser.pdf

id	ump-26175
recordtype	eprints
spelling	ump-261752020-02-06T08:27:18Z http://umpir.ump.edu.my/id/eprint/26175/ Experimental micromachining of silicon with Nd-YAG laser Mon, Thet Thet Khairul Fikri, Muhammad Asnul Hadi, Ahmad Zazuli, Mohid TJ Mechanical engineering and machinery This research centers on experimental laser-micromachining of silicon using solid state pulsed Nd:YAG laser. The laser is equipped with 3-axis controllers with resolution of 1 μm. The main objective is to find out the possibility of using this laser machining system to fabricate a micro feature on silicon. Simple straight lines were generated on silicon surface. The two process parameters – the laser traverse speed and pulse energy- were considered in the experimental design. Two forms of experiments were carried out: (1) processing with air assist gas and (2) processing without the assist gas using the same experimental design. Standard full factorial design of 3k was used to design the experiments. Repeatability of the machine and nonlinearity were taken into account in the design by adding center points. Sequence of experiments was also randomized. Statistical analysis of experimental results could not show any significant factor. However, the surface plot did provide general information on desirable regions for the response line width, which was consistent with the published results. Micrograph study of the featured lines revealed that the laser processing without the assist gas produced preferable results. 2011 Conference or Workshop Item PeerReviewed pdf en http://umpir.ump.edu.my/id/eprint/26175/1/Experimental%20Micromachining%20of%20Silicon%20with%20Nd-YAG%20Laser.pdf Mon, Thet Thet and Khairul Fikri, Muhammad and Asnul Hadi, Ahmad and Zazuli, Mohid (2011) Experimental micromachining of silicon with Nd-YAG laser. In: International Conference on Experimental Mechanics (ICEM 2010), 29 November - 1 December 2010 , Kuala Lumpur. pp. 244-248., 83. ISSN 16609336 ISBN 978-303785221-7 https://doi.org/10.4028/www.scientific.net/AMM.83.244
repository_type	Digital Repository
institution_category	Local University
institution	Universiti Malaysia Pahang
building	UMP Institutional Repository
collection	Online Access
language	English
topic	TJ Mechanical engineering and machinery
spellingShingle	TJ Mechanical engineering and machinery Mon, Thet Thet Khairul Fikri, Muhammad Asnul Hadi, Ahmad Zazuli, Mohid Experimental micromachining of silicon with Nd-YAG laser
description	This research centers on experimental laser-micromachining of silicon using solid state pulsed Nd:YAG laser. The laser is equipped with 3-axis controllers with resolution of 1 μm. The main objective is to find out the possibility of using this laser machining system to fabricate a micro feature on silicon. Simple straight lines were generated on silicon surface. The two process parameters – the laser traverse speed and pulse energy- were considered in the experimental design. Two forms of experiments were carried out: (1) processing with air assist gas and (2) processing without the assist gas using the same experimental design. Standard full factorial design of 3k was used to design the experiments. Repeatability of the machine and nonlinearity were taken into account in the design by adding center points. Sequence of experiments was also randomized. Statistical analysis of experimental results could not show any significant factor. However, the surface plot did provide general information on desirable regions for the response line width, which was consistent with the published results. Micrograph study of the featured lines revealed that the laser processing without the assist gas produced preferable results.
format	Conference or Workshop Item
author	Mon, Thet Thet Khairul Fikri, Muhammad Asnul Hadi, Ahmad Zazuli, Mohid
author_facet	Mon, Thet Thet Khairul Fikri, Muhammad Asnul Hadi, Ahmad Zazuli, Mohid
author_sort	Mon, Thet Thet
title	Experimental micromachining of silicon with Nd-YAG laser
title_short	Experimental micromachining of silicon with Nd-YAG laser
title_full	Experimental micromachining of silicon with Nd-YAG laser
title_fullStr	Experimental micromachining of silicon with Nd-YAG laser
title_full_unstemmed	Experimental micromachining of silicon with Nd-YAG laser
title_sort	experimental micromachining of silicon with nd-yag laser
publishDate	2011
url	http://umpir.ump.edu.my/id/eprint/26175/ http://umpir.ump.edu.my/id/eprint/26175/ http://umpir.ump.edu.my/id/eprint/26175/1/Experimental%20Micromachining%20of%20Silicon%20with%20Nd-YAG%20Laser.pdf
first_indexed	2023-09-18T22:40:36Z
last_indexed	2023-09-18T22:40:36Z
_version_	1777416888640339968

Experimental micromachining of silicon with Nd-YAG laser

Similar Items